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Theses and Dissertations

MEMS

2014

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Finite Element Analysis Simulations Of Micro And Nano-Electromechanical Sensors For Design Optimization, Nicholas Frank Deroller Dec 2014

Finite Element Analysis Simulations Of Micro And Nano-Electromechanical Sensors For Design Optimization, Nicholas Frank Deroller

Theses and Dissertations

Micro and Nano-electromechanical sensors (MEMS and NEMS) provide a means of actively sensing minute changes in the surrounding environment. Small changes in temperature, momentum, and strain may be sensed in passive modes while greater sensing possibilities exist in active modes. Theoretical femto-gram resolution mass detection and heated element sensing methods may be used while volatile organic compound (VOC) sensing may be achieved when combined with a functionalization layer or device heating. These devices offer a great reduction in cost and offer increased mobility by allowing a "lab-on-chip" solution for the prospective user while also greatly reducing the amount of energy ...


Piezotransistive Iii-V Nitride Microcantilever Based Mems/Nems Sensor For Photoacoustic Spectroscopy Of Chemicals, Abdul Hafiz Ibne Talukdar Dec 2014

Piezotransistive Iii-V Nitride Microcantilever Based Mems/Nems Sensor For Photoacoustic Spectroscopy Of Chemicals, Abdul Hafiz Ibne Talukdar

Theses and Dissertations

Microcantilevers are highly attractive as transducers for detecting chemicals, explosives, and biological molecules due to their high sensitivity, micro-scale dimensions, and low power consumption. Though optical transduction of the mechanical movement of the microcantilevers into an electrical signal is widely practiced, there is a continuous thrust to develop alternative transduction methods that are more conducive to the development of compact miniaturized sensors. Piezoelectric and piezoresistive transduction methods are two of the most popular ones that have been utilized to develop miniaturized sensor systems. Piezoelectric cantilevers, which are commonly made of PZT film, have demonstrated very high sensitivity; however, they suffer ...