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Theses and Dissertations

MEMS

2003

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Analysis And Design Of Surface Micromachined Micromanipulators For Out-Of-Plane Micropositioning, Kimberly A. Jensen Jul 2003

Analysis And Design Of Surface Micromachined Micromanipulators For Out-Of-Plane Micropositioning, Kimberly A. Jensen

Theses and Dissertations

This thesis introduces two ortho-planar MEMS devices that can be used to position microcomponents: the XZ Micropositioning Mechanism and the XYZ Micromanipulator. The displacement and force relationships are presented. The devices were fabricated using surface micromachining processes and the resulting mechanisms were tested. A compliant XYZ Micromanipulator was also designed to reduce backlash and binding. In addition, several other MEMS positioners were fabricated and tested: the Micropositioning Platform Mechanism (MPM), the Ortho-planar Twisting Micromechanism (OTM), and the Ortho-planar Spring Micromechanism (OSM).


Identification Of Macro- And Micro-Compliant Mechanism Configurations Resulting In Bistable Behavior, Brian D. Jensen Jun 2003

Identification Of Macro- And Micro-Compliant Mechanism Configurations Resulting In Bistable Behavior, Brian D. Jensen

Theses and Dissertations

The purpose of this research is to identify the configurations of several mechanism classes which result in bistable behavior. Bistable mechanisms have use in many applications, such as switches, clasps, closures, hinges, and so on. A powerful method for the design of such mechanisms would allow the realization of working designs much more easily than has been possible in the past. A method for the design of bistable mechanisms is especially needed for micro-electro-mechanical systems (MEMS) because fabrication and material constraints often prevent the use of simple, well-known bistable mechanism configurations. In addition, this knowledge allows designers to take advantage ...


A Self-Retracting Fully-Compliant Bistable Micromechanism, Nathan D. Masters Jun 2003

A Self-Retracting Fully-Compliant Bistable Micromechanism, Nathan D. Masters

Theses and Dissertations

The purpose of this research is to present a class of Self-Retracting Fully-compliant Bistable Micromechanisms (SRFBM). Fully-compliant mechanisms are needed to overcome the inherent limitations of microfabricated pin joints, especially in bistable mechanisms. The elimination of the clearances associated with pin joints will allow more efficient bistable mechanisms with smaller travel. Small travel, in a linear path facilitates integration with efficient on-chip actuators. Tensural pivots are developed and used to deal with the compressive loading to which the mechanism is subject. SRFBM are modeled using the Pseudo-Rigid-Body Model and finite element analysis. Suitable configurations of the SRFBM concept have been ...


Development Of In-Plane Compliant Bistable Microrelays, Troy Alan Gomm Jun 2003

Development Of In-Plane Compliant Bistable Microrelays, Troy Alan Gomm

Theses and Dissertations

Bistable microrelays have many possible applications and have the potential to reduce the size, weight, power consumption, and cost of products in which they are used. This research outlines the current state of microrelays, presents three new compliant bistable micromechanisms, and characterizes their performance as microrelays. The characterization includes a treatment of a new force-tester, a preliminary contact resistance study, contact-force measurements, switching time measurements, insertion loss, AC isolation, breakdown voltage, and DC isolation. This document also includes recommendations for further research.


The Pseudo-Rigid-Body Model For Dynamic Predictions Of Macro And Micro Compliant Mechanisms, Scott Marvin Lyon Apr 2003

The Pseudo-Rigid-Body Model For Dynamic Predictions Of Macro And Micro Compliant Mechanisms, Scott Marvin Lyon

Theses and Dissertations

This work discusses the dynamic predictions of compliant mechanisms using the Pseudo-Rigid-Body model (PRBM). In order to improve the number of mechanisms that can be modeled, this research develops and identifies several key concepts in the behavior of beam segments where both ends are fixed to a rigid body (fixed-fixed flexible segments). A model is presented, and several examples are discussed. The dynamic behavior of several compliant segments is predicted using the PRBM and the results are compared to finite element analysis and experimental results. Details are presented as to the transient behavior of a typical uniform rectangular cross section ...


On-Chip Actuation Of Compliant Bistable Micro-Mechanisms, Michael S. Baker Mar 2003

On-Chip Actuation Of Compliant Bistable Micro-Mechanisms, Michael S. Baker

Theses and Dissertations

Two compliant bistable micro-mechanisms have been developed which can be switched in either direction using on-chip thermal actuation. The energy storage and bistable behavior of the mechanisms are achieved through the elastic deflection of compliant segments. The pseudo-rigid-body model was used for the compliant mechanism design, and for analysis of the large-deflection flexible segments. To achieve on-chip actuation, the mechanism designs were optimized to reduce their required rotation, allow them to be switched using linear-motion thermal actuators. The modeling theory and analysis are presented for several design iterations. Each iteration was successfully fabricated and tested using either the MUMPs or ...


Thermal Microactuators For Microelectromechanical Systems (Mems), Rebecca Cragun Mar 2003

Thermal Microactuators For Microelectromechanical Systems (Mems), Rebecca Cragun

Theses and Dissertations

Microactuators are needed to convert energy into mechanical work at the microscale. Thermal microactuators can be used to produce this needed mechanical work. The purpose of this research was to design, fabricate, and test thermal microactuators for use at the microscale in microelectromechanical systems (MEMS). The microactuators developed were tested to determine the magnitude of their deflection and estimate their force. Five groups of thermal microactuators were designed and tested. All of the groups used the geometrically constrained expansion of various segments to produce their deflection. The first group, Thermal Expansion Devices (TEDs), produced a rotational displacement and had deflections ...