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Theses and Dissertations

MEMS

Mechanical Engineering

2019

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Advanced Techniques For Carbon Nanotube Templated Microfabrication, Jason Matthew Lund Dec 2019

Advanced Techniques For Carbon Nanotube Templated Microfabrication, Jason Matthew Lund

Theses and Dissertations

Carbon nanotube templated microfabrication (CNT-M) is a term describing a grouping of processes where carbon nanotubes (CNTs) serve a structural role in the fabrication of a material or device. In its basic form, CNT-M is comprised of two steps: produce a template made from carbon nanotubes and infiltrate the porous template with an additional material. Vertically aligned carbon nanotube (VACNT) templates can be grown to heights ranging from microns to millimeters and lithographically patterned to a desired form. Deposition of an existing thin film material onto a CNT template will coat all template surfaces and can produce a near solid …


Secondary Resonances Of Electrostatically Actuated Mems Cantilevers, Christopher I. Reyes May 2019

Secondary Resonances Of Electrostatically Actuated Mems Cantilevers, Christopher I. Reyes

Theses and Dissertations

In this work the behavior of micro-electromechanical (MEMS) cantilever resonators is investigated. The cantilever resonators are electrostatically actuated with hard AC voltage resulting in nine distinct resonances cases including super and subharmonic resonances. The amplitude frequency and amplitude voltage bifurcation diagrams are obtained for each of the nine resonance cases. Reduced order models (ROMs) are developed to include one and two modes of vibration. Three different methods are used to solve the ROMs namely 1) the method of multiple scales (MMS), which is a perturbation method used for one mode of vibration, 2) the homotopy analysis method (HAM), which is …