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Secondary Resonances Of Electrostatically Actuated Mems Cantilevers, Christopher I. Reyes
Secondary Resonances Of Electrostatically Actuated Mems Cantilevers, Christopher I. Reyes
Theses and Dissertations
In this work the behavior of micro-electromechanical (MEMS) cantilever resonators is investigated. The cantilever resonators are electrostatically actuated with hard AC voltage resulting in nine distinct resonances cases including super and subharmonic resonances. The amplitude frequency and amplitude voltage bifurcation diagrams are obtained for each of the nine resonance cases. Reduced order models (ROMs) are developed to include one and two modes of vibration. Three different methods are used to solve the ROMs namely 1) the method of multiple scales (MMS), which is a perturbation method used for one mode of vibration, 2) the homotopy analysis method (HAM), which is …