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Theses

2015

MEMS

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A Wireless Communication Platform For Mems Sensors, Chen Chen Aug 2015

A Wireless Communication Platform For Mems Sensors, Chen Chen

Theses

Wireless measurement systems combining current advanced information collection, processing and wireless communication technology, have been applied to information measurement in special occasions. As a short range wireless communication technology, bluetooth is low cost, stable, and low power. Bluetooth technology is used in monitoring and wireless control system widely.

ArduinoBT is the bluetooth version of the general Arduino board, which is open source and convenient as a wireless development tool.

This thesis presents a hardware and software experimental wireless platform for the application of multiple kinds of MEMS sensors. By the combination of ArduinoBT and signal conditioning circuit, different types of …


Aluminum Nitride Contour Mode Resonators, Joshua Robert Melnick May 2015

Aluminum Nitride Contour Mode Resonators, Joshua Robert Melnick

Theses

Resonators are a major component in RF electronic products. They are used in a host of ways to filter radio signals. Modern and Future RF communications have placed high demands on the industry; requiring low power usage, wide array of applications and resistance to noise.

In this thesis, a discussion of the motivation for RF MEMS filters and basic theory is given with an explanation of the concepts of Q factor, piezoelectricity, acoustics theory, the major types of resonators (SAW, BAW, CMR or LAMB), apodization theory and techniques as well as design, simulation of CMR and BAW devices, testing and …


Cmos Compatible 3-Axis Magnetic Field Sensor Using Hall Effect Sensing, Joshua R. Locke Feb 2015

Cmos Compatible 3-Axis Magnetic Field Sensor Using Hall Effect Sensing, Joshua R. Locke

Theses

The purpose of this study is to design, fabricate and test a CMOS compatible 3-axis Hall effect sensor capable of detecting the earth’s magnetic field, with strength’s of ~50 μT. Preliminary testing of N-well Van Der Pauw structures using strong neodymium magnets showed proof of concept for hall voltage sensing, however, poor geometry of the structures led to a high offset voltage. A 1-axis Hall effect sensor was designed, fabricated and tested with a sensitivity of 1.12x10-3 mV/Gauss using the RIT metal gate PMOS process. Poor geometry and insufficient design produced an offset voltage of 0.1238 volts in the 1-axis …