Open Access. Powered by Scholars. Published by Universities.®
- Discipline
Articles 1 - 4 of 4
Full-Text Articles in Entire DC Network
Low Temperature Tensile Testing Of Independently Fabricated Gold Thin Film Samples, Adnan Raza
Low Temperature Tensile Testing Of Independently Fabricated Gold Thin Film Samples, Adnan Raza
Mechanical Engineering ETDs
Tensile testing of free standing thin films is of great importance for determining their material properties. Samples have always been co fabricated with the MEMS device being used as the test apparatus. Consequently, a new device has to be used each time a new sample is tested, resulting in loss of precision. The proposed idea is to independently fabricate free standing gold thin film samples and transfer them to a separately fabricated cascaded thermal actuator setup. Thermal actuators are desirable due to the large deflections and forces they provide while maintaining a relatively low thermal gradient across the test specimen. …
Theory, Fabrication, And Experimentation Of Phononic Crystals In Mems At Micro/Nano Scale: Engineering Of Thermal And Rf Phonons To Applications In Thermoelectrics And Microresonators, Seyedhamidreza Alaie
Theory, Fabrication, And Experimentation Of Phononic Crystals In Mems At Micro/Nano Scale: Engineering Of Thermal And Rf Phonons To Applications In Thermoelectrics And Microresonators, Seyedhamidreza Alaie
Mechanical Engineering ETDs
Phononic Crystals (PnCs) are novel materials comprised of a periodic structure of inclusions in a matrix. This periodic arrangement creates phononic bandgaps, and modifies phononic bandstructures of a material. Such a property offers promising applications at the micro and nano scales to engineer acoustic filters, high Q-factor resonators, and thermoelectric properties of materials. Studying PnCs at the micro/nano scale requires specific characterization techniques, which rely on Micro Electro Mechanical Structures (MEMS). This work focuses on the study, and characterization of PnCs using MEMS in view of their prospective applications in thermoelectric materials, microresonators and acoustic filters, and also the prospective …
Characterization Of Mechanical Properties At The Micro/Nano Scale: Stiction Failure Of Mems, High-Frequency Michelson Interferometry And Carbon Nanofibers, Arash Kheyraddini Mousavi
Characterization Of Mechanical Properties At The Micro/Nano Scale: Stiction Failure Of Mems, High-Frequency Michelson Interferometry And Carbon Nanofibers, Arash Kheyraddini Mousavi
Mechanical Engineering ETDs
Different forces scale differently with decreasing length scales. Van der Waals and surface tension are generally ignored at the macro scale, but can become dominant at the micro and nano scales. This fact, combined with the considerable compliance and large surface areas of micro and nano devices, can leads to adhesion in MicroElectroMechanical Systems (MEMS) and NanoElectroMechanical Systems (NEMS) - a.k.a. stiction-failure. The adhesive forces between MEMS devices leading to stiction failure are characterized in this dissertation analytically and experimentally. Specifically, the adhesion energy of poly-Si μcantilevers are determined experimentally through Mode II and mixed Mode I&II crack propagation experiments. …
Design, Fabrication, And Characterization Of A Mems Based Thermally Actuated Fabry-Pã©Rot Interferometer., Andrew Ian Young
Design, Fabrication, And Characterization Of A Mems Based Thermally Actuated Fabry-Pã©Rot Interferometer., Andrew Ian Young
Mechanical Engineering ETDs
MEMS devices have become ubiquitous in consumer devices and are also being used to conduct experiments on the nano and micro scale. There is a growing need to test the properties of materials at the micro and nanoscale. In order to test those materials, a reliable method of sensing displacement is needed. Another growing area of MEMS research is in creating micro optical cavities that allow for manipulation and control of atoms in QED research. This thesis describes a MEMS based thermally actuated Fabry-Pérot cavity interferometer that has potential as a displacement sensing mechanism for use in material testers and …