Digital Commons Network^™

A Resonant Based Test Methodology For Capacitive Mems, Ali Dianat

Electronic Theses and Dissertations

This work presents a test method for capacitive Micro-Electro-Mechanical Systems (MEMS). A major class of MEMS sensors operate based on the principle of capacitance variation.The proposed test method in this work utilizes a resonant circuit to detect structural defects of capacitive MEMS sensors. It is shown that a small variation of MEMS capacitance due to a defect alters the resonance frequency considerably. It is also shown that the variation of the output amplitude can be observed for fault detection if an inductor with a high quality factor is employed in the test circuit. Mathematical approach is taken and verified to …