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Computational Analysis Of Input-Shaping Control Of Microelectromechanical Mirrors, Thomas Starling
Computational Analysis Of Input-Shaping Control Of Microelectromechanical Mirrors, Thomas Starling
All Theses
Advances in micromachining technology have enabled the design and development of high performance microelectromechanical systems (MEMS). There is a pressing need for control techniques that can be used to improve the dynamic behavior of MEMS such as the response speed and precision. In MEMS applications, open-loop control is attractive as it computes a priori the required system input to achieve desired dynamic behavior without using feedback, thus eliminating the problems associated with closed-loop MEMS control. While the input-shaping control is attractive due to its simplicity, the effectiveness of this control approach depends on the accuracy of the model that is …
Analysis Of The Nonlinear Vibrations Of Electrostatically Actuated Micro-Cantilevers In Harmonic Detection Of Resonance (Hdr), Jonathan Taylor
Analysis Of The Nonlinear Vibrations Of Electrostatically Actuated Micro-Cantilevers In Harmonic Detection Of Resonance (Hdr), Jonathan Taylor
All Theses
Micro- and nano-cantilevers have the potential to revolutionize physical, chemical, and biological sensing; however, an accurate and scalable detection method is required. In this work, a fully electrical actuation and detection method is presented, known as the Harmonic Detection of Resonance (HDR). In HDR, harmonic components of the current are measured to determine the cantilever's resonance frequency. These harmonics exist as a result of nonlinearities in the system, principally in the electrostatic actuation force. In order to better understand this rich harmonic structure, a theoretical investigation of the micro-cantilever is undertaken. Both a lumped parameter model and a more accurate …