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Nonlinear Vibration And Frequency Response Analysis Of Nanomechanical Cantilever Beams, Seyed Nima Mahmoodi Aug 2007

Nonlinear Vibration And Frequency Response Analysis Of Nanomechanical Cantilever Beams, Seyed Nima Mahmoodi

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Microcantilevers are one the most commonly utilized microelectromechanical systems in a variant of the ultra-precise scanning and characterization application. Of particular interest, the problem of vibrations of microcantilevers has recently received considerable attention due to its application in several nanotechnological instruments such as atomic force microscopy, nanomechanical cantilever sensors and friction force microscopy. For applications such as these, the problem of coupled flexural-torsional nonlinear vibrations of a piezoelectrically-actuated microcantilever beam is considered in this dissertation. The actuation and sensing are both facilitated through bonding a piezoelectric layer (here, ZnO) on the microcantilever surface. The beam is considered to have simultaneous …