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Process Optimization And Consumable Development For Chemical Mechanical Planarization (Cmp) Processes, Subrahmanya R. Mudhivarthi

USF Tampa Graduate Theses and Dissertations

Chemical Mechanical Planarization (CMP) is one of the most critical processing steps that enables fabrication of multilevel interconnects. The success of CMP process is limited by the implementation of an optimized process and reduction of process generated defects along with post CMP surface characteristics such as dishing and erosion. This thesis investigates to identify various sources of defects and studies the effect of factors that can be used to optimize the process. The major contributions of this work are: Understanding the effect of temperature rise on surface tribology, electrochemistry and post CMP pattern effects during the CMP process; investigating the …

Improved Techniques For Nonlinear Electrothermal Fet Modeling And Measurement Validation, Charles Passant Baylis Ii

USF Tampa Graduate Theses and Dissertations

Accurate transistor models are important in wireless and microwave circuit design. Large-signal field-effect transistor (FET) models are generally extracted from current-voltage (IV) characteristics, small-signal S-parameters, and large-signal measurements. This dissertation describes improved characterization and measurement validation techniques for FET models that correctly account for thermal and trapping effects.

Demonstration of a customized pulsed-bias, pulsed-RF S-parameter system constructed by the author using a traditional vector network analyzer is presented, along with the design of special bias tees to allow pulsing of the bias voltages. Pulsed IV and pulsed-bias S-parameter measurements can provide results that are electrodynamically accurate; that is, thermal and …

Satellite-Derived Surface Current Divergence In Relation To Tropical Atlantic Sst And Wind, Robert W. Helber, Robert H. Weisberg, Fabrice Bonjean, Eric S. Johnson, Gary S. Lagerloef

Marine Science Faculty Publications

The relationships between tropical Atlantic Ocean surface currents and horizontal (mass) divergence, sea surface temperature (SST), and winds on monthly-to-annual time scales are described for the time period from 1993 through 2003. Surface horizontal mass divergence (upwelling) is calculated using surface currents estimated from satellite sea surface height, surface vector wind, and SST data with a quasi-linear, steady-state model. Geostrophic and Ekman dynamical contributions are considered. The satellite-derived surface currents match climatological drifter and ship-drift currents well, and divergence patterns are consistent with the annual north–south movement of the intertropical convergence zone (ITCZ) and equatorial cold tongue evolution. While the …