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New Polymeric Resists For Electron Beam Lithography., Ameeta Narula
New Polymeric Resists For Electron Beam Lithography., Ameeta Narula
Masters Theses 1911 - February 2014
Multiple thin films which are conducting, insulating and semiconducting are important components of integrated circuit technology. Circuits are fabricated from these layers by patterning the films to form isolated circuit elements which are themselves interconnected by patterned films (1).