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Development Of Micro-Scale High Aspect Ratio Patterned Features With Electroless Nickel Plating, Lorli Smith
Development Of Micro-Scale High Aspect Ratio Patterned Features With Electroless Nickel Plating, Lorli Smith
Theses and Dissertations--Mechanical Engineering
This thesis describes a novel method designed to pattern high aspect ratio metallic microscale features using a modified photolithography and electroless nickel plating process. This method utilizes modified photolithography techniques to create a polymer mold that is used to control the location of metal deposition on substrate during electroless nickel plating. In order to generate high aspect ratio mold features, a multiple spin-step process was developed to deposit thick layers of SU-8 photoresist, and inclined lithography was also used to generate tapered sidewalls that could help aid mold removal after plating. Results from electroplating experiments were evaluated using a Zygo …