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Multiscale Modeling, Simulations, And Experiments Of Coating Growth On Nanofibers. Part Ii. Deposition, A. Buldum, C. B. Clemons, L. H. Dill, K. L. Kreider, G. W. Young, X. Zheng, Edward A. Evans, G. Zhang, S. I. Hariharan
Multiscale Modeling, Simulations, And Experiments Of Coating Growth On Nanofibers. Part Ii. Deposition, A. Buldum, C. B. Clemons, L. H. Dill, K. L. Kreider, G. W. Young, X. Zheng, Edward A. Evans, G. Zhang, S. I. Hariharan
Chemical, Biomolecular, and Corrosion Engineering Faculty Research
This work is Part II of an integrated experimental/modeling investigation of a procedure to coat nanofibers and core-clad nanostructures with thin-film materials using plasma-enhanced physical vapor deposition. In the experimental effort, electrospun polymer nanofibers are coated with aluminum materials under different operating conditions to observe changes in the coating morphology. This procedure begins with the sputtering of the coating material from a target. Part I [J. Appl. Phys. 98, 044303 (2005)] focused on the sputtering aspect and transport of the sputtered material through the reactor. That reactor level model determines the concentration field of the coating material. This field serves …
Multiscale Modeling, Simulations, And Experiments Of Coating Growth On Nanofibers. Part I. Sputtering, A. Buldum, I. Busuladzic, C. B. Clemons, L. H, Dill, K. L. Kreider, G. W. Young, Edward A. Evans, G. Zhang, S. I. Hariharan, W. Kiefer
Multiscale Modeling, Simulations, And Experiments Of Coating Growth On Nanofibers. Part I. Sputtering, A. Buldum, I. Busuladzic, C. B. Clemons, L. H, Dill, K. L. Kreider, G. W. Young, Edward A. Evans, G. Zhang, S. I. Hariharan, W. Kiefer
Chemical, Biomolecular, and Corrosion Engineering Faculty Research
This paper is Part I of an integrated experimental/modeling investigation of a procedure to coat nanofibers and core-clad nanostructures with thin-film materials using plasma-enhanced physical vapor deposition. In the experimental effort, electrospun polymer nanofibers are coated with aluminum under varying operating conditions to observe changes in the coating morphology. This procedure begins with the sputtering of the coating material from a target. This paper focuses on the sputtering process and transport of the sputtered material through the reactor. The interrelationships among the processing factors for the sputtering and transport are investigated from a detailed modeling approach that describes the salient …
Spm Oxidation And Parallel Writing On Zirconium Nitride Thin Films, N. Farkas, J. R. Comer, G. Zhang, Edward A. Evans, R. D. Ramsier, J. A. Dagata
Spm Oxidation And Parallel Writing On Zirconium Nitride Thin Films, N. Farkas, J. R. Comer, G. Zhang, Edward A. Evans, R. D. Ramsier, J. A. Dagata
Chemical, Biomolecular, and Corrosion Engineering Faculty Research
Systematic investigation of the SPM oxidation process of sputter-deposited ZrN thin films is reported. During the intrinsic part of the oxidation, the density of the oxide increases until the total oxide thickness is approximately twice the feature height. Further oxide growth is sustainable as the system undergoes plastic flow followed by delamination from the ZrN-silicon interface keeping the oxide density constant. ZrN exhibits superdiffusive oxidation kinetics in these single tip SPM studies. We extend this work to the fabrication of parallel oxide patterns 70 nm in height covering areas in the square centimeter range. This simple, quick, and well-controlled parallel …