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Design And Characterization Of A Low Cost Mems Imu Cluster For Precision Navigation, Daniel R. Greenheck
Design And Characterization Of A Low Cost Mems Imu Cluster For Precision Navigation, Daniel R. Greenheck
Master's Theses (2009 -)
The fast paced development of micro-electromechanical systems (MEMS) technology in recent years has resulted in the availability of low cost gyroscopes and accelerometers in commercial markets. These sensors can be integrated into a single device known as an inertial measurement unit (IMU). An IMU is capable of tracking and navigating a vehicle for a short period of time in the absence of external position and attitude updates. The precision of the manufacturing techniques used to fabricate commercial MEMS sensors as well as their mechanical nature result in noise and errors that limit their performance. It has been mathematically shown that …
Cantilever-Based Resonant Microsensors With Integrated Temperature Modulation For Transient Chemical Analysis, C. Carron, P. Getz, Stephen M. Heinrich, Fabien Josse, Oliver Brand
Cantilever-Based Resonant Microsensors With Integrated Temperature Modulation For Transient Chemical Analysis, C. Carron, P. Getz, Stephen M. Heinrich, Fabien Josse, Oliver Brand
Civil and Environmental Engineering Faculty Research and Publications
This work introduces a resonant cantilever platform with integrated temperature modulation for real-time chemical sensing. Embedded heaters allow for rapid thermal cycling of individual sensors, thereby enabling real-time transient signal analysis without the need for a microfluidic setup to switch between analyte and reference gases. Compared to traditional mass-sensitive microsensors operating in steady state, the on-chip generation of signal transients provides additional information for analyte discrimination.