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Development Of A Counter-Flow Thermal Gradient Microfluidic Device, Shayan Davani

Doctoral Dissertations

This work presents a novel counter-flow design for thermal stabilization of microfluidic thermal reactors. In these reactors, precise control of temperature of the liquid sample is achieved by moving the liquid sample through the thermal zones established ideally through the conduction in the solid material of the device. The goal here is to establish a linear thermal distribution when there is no flow and to minimize the temperature change at flow condition. External convection as well as internal flowinduced effects influence the prescribed thermal distribution. The counter-flow thermal gradient device developed in this study is capable of both stabilizing the …

Design, Modeling, Fabrication, And Testing Of A Multistage Micro Gas Compressor With Piezoelectric Unimorph Diaphragm And Passive Microvalves For Microcooling Applications, Shawn Thanhson Le

Doctoral Dissertations

This dissertation investigates the development of a multistage micro gas compressor utilizing multiple pump stages cascaded in series to increase the pressure rise with passive microvalves and piezoelectric unimorph diaphragms. This research was conducted through modeling, simulation, design, and fabrication of the microcompressor and its components. A single-stage and a two-stage microcompressor were developed to demonstrate and compare the performance and effectiveness of using a cascaded multistage design.

Steady fluid flow through static microvalves structure was studied to gain insight on its gas flow dynamics and characteristics. Transient analysis combined with the structure's interaction was investigated with an analytical model …

Quartz-Mems: Wet Chemical Etching Assisted By Electromagnetic Energy Sources For The Development Of Quartz Crystal To Be Used For Microelectromechanical Systems, William J. Clower

Doctoral Dissertations

Quartz crystal resonators have been the most commonly used timing devices to date. Today's timing market requires devices to be as small as possible and consume smaller amounts of energy. Because of the market demand, many startup companies have formed to develop silicon resonators as timing devices. Silicon resonators have poor noise and temperature performance (due to its linear temperature versus frequency coefficient). At the moment the only advantage that silicon resonators have over quartz crystal resonators is a small form factor. The photolithography processing method currently being used in industry is a very tedious task, requiring multiple etching steps …

Layer-By-Layer Nanoassembly Combined With Microfabrication Techniques For Microelectronics And Microelectromechanical Systems, Jingshi Shi

Doctoral Dissertations

The objective of this work is to investigate the combination of layer-by-layer self-assembly with microfabrication technology and its applications in microelectronics and MEMS.

One can assemble, on a standard silicon wafer, needed multilayers containing different nanoparticles and polymers and then apply various micromanufacturing techniques to form microdevices with nanostructured elements.

Alternate layer-by-layer self-assembly of linear polyions and colloidal silica at elevated temperatures have been firstly studied by QCM and SEM. LbL self-assembly and photolithography were combined to fabricate an indium resistor. The RTA method was employed in the fabrication. Hot-embossing technique as a reasonably fast and moderately expensive technique was …

A Lateral Comb Drive On Pmma By Hot Embossing Technique, Yongjun Zhao

Doctoral Dissertations

The objective of this work is to fabricate a laterally driven comb drive on low-cost poly-methyl-meth-acrylate (PMMA) by hot embossing technology.

An electrostatic comb drive is one of the most important components in Micro-Electro-Mechanical Systems (MEMS). A comb drive can work as both a sensor and an actuator. Varieties of comb drives have been developed on silicon and poly-silicon materials.

Hot embossing of polymers is a promising alternative to traditional silicon processes due to cost-reduction. It fulfills the demand for low-cost methods for high volume production of micro-components and micro-systems. The raw materials of polymer are relatively inexpensive. For the …

Vertical Polymer Tunneling Sensor Platform By Hot Embossing Technique, Jing Wang

Doctoral Dissertations

Recent development in microfabrication technology has brought much attention to the development of miniaturized, inexpensive and high-accuracy MEMS devices and microsystems. The ultimate goal of our project is to develop a versatile, three-dimensional, high precision sensor platform, which can be used for displacement, velocity or acceleration measurement. The first step, on which this dissertation is based, is to fabricate a one-dimensional (parallel with the Z axis) tunneling sensor, which in turn can be developed into two- and three-dimensional sensor platforms through structural and functional integration.

Since the invention of mini-structured high-sensitivity silicon-based tunneling sensor in 1993, the synthesis and fabrication …