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Quantum Dynamics Effects On Amplitude-Frequency Response Of Superharmonic Resonance Of Second-Order Of Electrostatically Actuated Nems Circular Plates, Dumitru Caruntu, Julio S. Beatriz May 2022

Quantum Dynamics Effects On Amplitude-Frequency Response Of Superharmonic Resonance Of Second-Order Of Electrostatically Actuated Nems Circular Plates, Dumitru Caruntu, Julio S. Beatriz

Mechanical Engineering Faculty Publications and Presentations

This work deals with the effects of Casimir and/or van der Waals forces (quantum dynamics phenomena) on the amplitude-frequency response of the superharmonic resonance of second-order of axisymmetric vibrations of electrostatically actuated nanoelectromechanical systems (NEMS) clamped circular plates. Electrostatic actuation consists of alternating current (AC) voltage of magnitude to produce hardexcitationsandoffrequencynearonefourththenaturalfrequencyoftheclamped circular plate. The intermolecular forces Casimir and van der Waals, damping force, and electrostatic force are the forces acting on the NEMS plate. Six Reduced Order Models (ROMs) with one and up to 6 modes of vibration are used. The ROM with one mode of vibration is solved using …


Open-Loop Control Of Electrostatic Levitation Actuators To Enhance The Travel-Range Of Optical Switches, Mohammad Mousavi, Mohammad Alzgool, Daniel Lopez, Shahrzad Towfighian Feb 2022

Open-Loop Control Of Electrostatic Levitation Actuators To Enhance The Travel-Range Of Optical Switches, Mohammad Mousavi, Mohammad Alzgool, Daniel Lopez, Shahrzad Towfighian

Mechanical Engineering Faculty Scholarship

Command shaping is a driving technique for handling the large settling time of the high-Q-MEMS actuators. The strong nonlinearity due to the electrostatic actuation limits the linear operation range in cantilevered or torsional micro-mirrors where command shaping techniques can be applied for positioning. Experimental and simulation results of this research demonstrate the effectiveness of using electrostatic levitation to overcome the actuation nonlinearities and a significant increase in the operation range. The motivation for this research is that applying the nonlinear command shaping causes complexity in command manipulation and requires an accurate knowledge of the nonlinear terms involved in the system …


Surface Acoustic Wave (Saw) Sensors: Physics, Materials, And Applications, Debdyuti Mandal, Sourav Banerjee Jan 2022

Surface Acoustic Wave (Saw) Sensors: Physics, Materials, And Applications, Debdyuti Mandal, Sourav Banerjee

Faculty Publications

Surface acoustic waves (SAWs) are the guided waves that propagate along the top surface of a material with wave vectors orthogonal to the normal direction to the surface. Based on these waves, SAW sensors are conceptualized by employing piezoelectric crystals where the guided elastodynamic waves are generated through an electromechanical coupling. Electromechanical coupling in both active and passive modes is achieved by integrating interdigitated electrode transducers (IDT) with the piezoelectric crystals. Innovative meta-designs of the periodic IDTs define the functionality and application of SAW sensors. This review article presents the physics of guided surface acoustic waves and the piezoelectric materials …