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Machine Learning Augmentation Micro-Sensors For Smart Device Applications, Mohammad H. Hasan

Department of Mechanical and Materials Engineering: Dissertations, Theses, and Student Research

Novel smart technologies such as wearable devices and unconventional robotics have been enabled by advancements in semiconductor technologies, which have miniaturized the sizes of transistors and sensors. These technologies promise great improvements to public health. However, current computational paradigms are ill-suited for use in novel smart technologies as they fail to meet their strict power and size requirements. In this dissertation, we present two bio-inspired colocalized sensing-and-computing schemes performed at the sensor level: continuous-time recurrent neural networks (CTRNNs) and reservoir computers (RCs). These schemes arise from the nonlinear dynamics of micro-electro-mechanical systems (MEMS), which facilitates computing, and the inherent ability …

Feasibility Study Of A Mems Threshold-Pressure Sensor Based On Parametric Resonance: Experimental And Theoretical Investigations, Mark Pallay, Meysam Daeichin, Shahrzad Towfighian

Mechanical Engineering Faculty Scholarship

A tunable threshold pressure sensor based on para- metric resonance of a microbeam subjected to electrostatic levitation is proposed. Parametric excitation can trigger a large amplitude vibration at twice the natural frequency if the mag- nitude of the driving force is large enough to overcome energy loss mechanisms in the system such as squeeze film damping. This causes a temporarily unstable response with a significant gain in oscillation amplitude over time until it is eventually capped by nonlinearities in the force or material or geometric properties. The instability divides the frequency region into two regions: distinct responses bounded by the …

Towards A High Bias Voltage Mems Filter Using Electrostatic Levitation, Mark Pallay, Ronald Miles, Shahrzad Towfighian

Mechanical Engineering Faculty Scholarship

Traditional MEMS filters use a comb drive structure that suffers from the pull- in instability, which places a significant limitation on the achievable signal-to- noise ration of the sensor. Because the output signal from a capacitive sensor

is linearly related to the applied voltage, it is desirable to use a capacitive sensor that can withstand large voltages upwards of 100V. However, the pull-in instability causes high voltages to destroy the device and a trade-off between performance and reliability must be made. Electrostatic levitation, which works by pulling electrodes apart instead of together, eliminates the pull-in instability and allows for very …

Porous Silica Nanotube Thin Films As Thermally Insulating Barrier Coatings, Derric B. Syme, Jason M. Lund, Brian D. Jensen, Robert C. Davis, Richard R. Vanfleet, Brian D. Iverson

Faculty Publications

The fabrication and examination of a porous silica thin film, potentially for use as an insulating thin film, were investigated. A vertically aligned carbon nanotube (CNT) forest, created by chemical vapor deposition (CVD), was used as scaffolding to construct the porous film. Silicon was deposited on the CNT forest using low-pressure CVD (LPCVD) and then oxidized to remove the CNTs and convert the silicon to silica for electrical or thermal passivation (e.g., thermal barrier). Thermal conductivity was determined using a 1D heat-transfer analysis that equated radiative heat loss in a vacuum with conduction through the substrate and thin film stack. …

Experimental Characterization Of The Electrostatic Levitation Force In Mems Transducers, Meysam Daeichin, Ronald Miles, Shahrzad Towfighian

Mechanical Engineering Faculty Scholarship

In this study, a two-step experimental procedure is described to determine the electrostatic levitation force in MEMS transducers. In these two steps, the microstructure is excited quasi-statically and dynamically and its response is used to derive the electrostatic force. The experimental results are obtained for a 1 by 1 plate that employs 112 levitation units. The experimentally obtained force is used in a lumped parameter model to find the microstructure response when it is subjected to different dynamical loads. The natural frequency and the damping ratios in the model are identified from the experimental results. The results show this procedure …

Lateral Pull-In Instability Of Electrostatic Mems Transducers Employing Repulsive Force, Meysam Daeichin, Ronald Miles, Shahrzad Towfighian

Mechanical Engineering Faculty Scholarship

We report on the lateral pull-in in capacitive MEMS transducers that employ a repulsive electrostatic force. The moving element in this system undergoes motion in two dimensions. A two degree-offreedom mathematical model is developed to investigate the pull-in quantitatively. The nonlinear electrostatic force, which is a vector function of two spatial coordinates, is determined by calculating the potential energy of the system using a boundary element approach. The equilibrium points are found by numerically solving the nonlinear coupled static equations. A stability analysis reveals that depending on the values of the lateral and transverse stiness, the system undergoes dierent bifurcations …

Development Of Micro-Scale High Aspect Ratio Patterned Features With Electroless Nickel Plating, Lorli Smith

Theses and Dissertations--Mechanical Engineering

This thesis describes a novel method designed to pattern high aspect ratio metallic microscale features using a modified photolithography and electroless nickel plating process. This method utilizes modified photolithography techniques to create a polymer mold that is used to control the location of metal deposition on substrate during electroless nickel plating. In order to generate high aspect ratio mold features, a multiple spin-step process was developed to deposit thick layers of SU-8 photoresist, and inclined lithography was also used to generate tapered sidewalls that could help aid mold removal after plating. Results from electroplating experiments were evaluated using a Zygo …