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Surface Acoustic Wave (Saw) Sensors: Physics, Materials, And Applications, Debdyuti Mandal, Sourav Banerjee
Surface Acoustic Wave (Saw) Sensors: Physics, Materials, And Applications, Debdyuti Mandal, Sourav Banerjee
Faculty Publications
Surface acoustic waves (SAWs) are the guided waves that propagate along the top surface of a material with wave vectors orthogonal to the normal direction to the surface. Based on these waves, SAW sensors are conceptualized by employing piezoelectric crystals where the guided elastodynamic waves are generated through an electromechanical coupling. Electromechanical coupling in both active and passive modes is achieved by integrating interdigitated electrode transducers (IDT) with the piezoelectric crystals. Innovative meta-designs of the periodic IDTs define the functionality and application of SAW sensors. This review article presents the physics of guided surface acoustic waves and the piezoelectric materials …
Porous Silica Nanotube Thin Films As Thermally Insulating Barrier Coatings, Derric B. Syme, Jason M. Lund, Brian D. Jensen, Robert C. Davis, Richard R. Vanfleet, Brian D. Iverson
Porous Silica Nanotube Thin Films As Thermally Insulating Barrier Coatings, Derric B. Syme, Jason M. Lund, Brian D. Jensen, Robert C. Davis, Richard R. Vanfleet, Brian D. Iverson
Faculty Publications
The fabrication and examination of a porous silica thin film, potentially for use as an insulating thin film, were investigated. A vertically aligned carbon nanotube (CNT) forest, created by chemical vapor deposition (CVD), was used as scaffolding to construct the porous film. Silicon was deposited on the CNT forest using low-pressure CVD (LPCVD) and then oxidized to remove the CNTs and convert the silicon to silica for electrical or thermal passivation (e.g., thermal barrier). Thermal conductivity was determined using a 1D heat-transfer analysis that equated radiative heat loss in a vacuum with conduction through the substrate and thin film stack. …
Improved Sensitivity Mems Cantilever Sensor For Terahertz Photoacoustic Spectroscopy, Ronald A. Coutu Jr., Ivan R. Medvedev, Douglas T. Petkie
Improved Sensitivity Mems Cantilever Sensor For Terahertz Photoacoustic Spectroscopy, Ronald A. Coutu Jr., Ivan R. Medvedev, Douglas T. Petkie
Faculty Publications
In this paper, a microelectromechanical system (MEMS) cantilever sensor was designed, modeled and fabricated to measure the terahertz (THz) radiation induced photoacoustic (PA) response of gases under low vacuum conditions. This work vastly improves cantilever sensitivity over previous efforts, by reducing internal beam stresses, minimizing out of plane beam curvature and optimizing beam damping. In addition, fabrication yield was improved by approximately 50% by filleting the cantilever’s anchor and free end to help reduce high stress areas that occurred during device fabrication and processing. All of the cantilever sensors were fabricated using silicon-on-insulator (SOI) wafers and tested in a custom …
Piezoresistive Feedback Control Of A Mems Thermal Actuator, Robert K. Messenger, Quentin Theodore Aten, Timothy W. Mclain, Larry L. Howell
Piezoresistive Feedback Control Of A Mems Thermal Actuator, Robert K. Messenger, Quentin Theodore Aten, Timothy W. Mclain, Larry L. Howell
Faculty Publications
Feedback control of MEMS devices has the potential to significantly improve device performance and reliability. One of the main obstacles to its broader use is the small number of on-chip sensing options available to MEMS designers. A method of using integrated piezoresistive sensing is proposed and demonstrated as another option. Integrated piezoresistive sensing utilizes the inherent piezoresistive property of polycrystalline silicon from which many MEMS devices are fabricated. As compliant MEMS structure’s flex to perform their functions, their resistance changes. That resistance change can be used to transduce the structures’ deflection into an electrical signal. The piezoresistive microdisplacement transducer (PMT) …
Observations Of Piezoresistivity For Polysilicon In Bending That Are Unexplained By Linear Models, Tyler L. Waterfall, Gary K. Johns, Robert K. Messenger, Brian D. Jensen, Timothy W. Mclain, Larry L. Howell
Observations Of Piezoresistivity For Polysilicon In Bending That Are Unexplained By Linear Models, Tyler L. Waterfall, Gary K. Johns, Robert K. Messenger, Brian D. Jensen, Timothy W. Mclain, Larry L. Howell
Faculty Publications
Compliant piezoresistive MEMS sensors exhibit great promise for improved on-chip sensing. As compliant sensors may experience complex loads, their design and implementation require a greater understanding of the piezoresistive effect of polysilicon in bending and combined loads. This paper presents experimental results showing the piezoresistive effect for these complex loads. Several n-type polysilicon test structures, fabricated in MUMPs and SUMMiT processes, were tested. Results show that, while tensile stresses cause a linear decrease in resistance, bending stresses induce a nonlinear rise in resistance, contrary to the effect predicted by linear models. In addition, tensile, compressive, and bending loads combine in …
Performance Comparison Of Pb(Zr0.52Ti0.48)O3-Only And Pb(Zr0.52Ti0.48)O3-On-Silicon Resonators, Hengky Chandrahalim, Sunil A. Bhave, Ronald G. Polcawich, Jeff Pulskamp, Dan Judy, Roger Kaul, Madan Dubey
Performance Comparison Of Pb(Zr0.52Ti0.48)O3-Only And Pb(Zr0.52Ti0.48)O3-On-Silicon Resonators, Hengky Chandrahalim, Sunil A. Bhave, Ronald G. Polcawich, Jeff Pulskamp, Dan Judy, Roger Kaul, Madan Dubey
Faculty Publications
This paper provides a quantitative comparison and explores the design space of lead zirconium titanate (PZT)–only and PZT-on-silicon length-extensional mode resonators for incorporation into radio frequency microelectromechanical system filters and oscillators. We experimentally measured the correlation of motional impedance (RX) and quality factor (Q) with the resonators’ silicon layer thickness (tSi). For identical lateral dimensions and PZT-layer thicknesses (tPZT), the PZT-on-silicon resonator has higher resonant frequency (fC), higher Q (5100 versus 140), lower RX (51 Ω versus 205 Ω), and better linearity [third-order input intercept …
Piezoresistive Feedback For Decreased Response Time Of Mems Thermal Actuators, Robert K. Messenger, Timothy W. Mclain, Larry L. Howell
Piezoresistive Feedback For Decreased Response Time Of Mems Thermal Actuators, Robert K. Messenger, Timothy W. Mclain, Larry L. Howell
Faculty Publications
Feedback control is commonly used in positioning systems to improve dynamic response, disturbance rejection, accuracy, and repeatability. Similar benefits can be expected for microelectromechanical systems (MEMS) that are used for positioning applications. Sensing at the micro level poses significant challenges. Most of these challenges are associated with the small size of the devices and the small motions and forces which are of interest. In many situations, applying the macro system paradigm, where the sensor is a component that is added to the system, leads to unacceptable results. At the macro level, sensors are typically small relative to the systems they …
Techniques In The Design Of Thermomechanical Microactuators, Larry L. Howell, Timothy W. Mclain, Michael S. Baker, Christian D. Lott
Techniques In The Design Of Thermomechanical Microactuators, Larry L. Howell, Timothy W. Mclain, Michael S. Baker, Christian D. Lott
Faculty Publications
The purpose of this chapter is to provide fundamental background for the design of thermomechanical microactuators. Actuation has been a particularly challenging aspect of microsystem development. Many actuation approaches used at the macro level, such as hydraulics, pneumatics, electric motors, internal combustion engines and turbines, are either too difficult to fabricate at the micro level or do not work well at that scale. Electrostatic attraction is one approach that has been widely used for actuation of microsystems; however, electrostatic actuators tend to have high voltage requirements and low output force capabilities. While electrostatic actuation is suitable for many applications, some …