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Investigating Mems Devices In Flow Conditions Relevant To Flow-Through Systems., Mohammad Shafquatul Islam
Investigating Mems Devices In Flow Conditions Relevant To Flow-Through Systems., Mohammad Shafquatul Islam
Electronic Theses and Dissertations
Advancements in microscale actuating technologies has substantially expanded the possibilities of interacting with the surrounding environment. Microstructures that deflect in response to mechanical forces are one of the largest application areas of microelectromechanical systems (MEMS). MEMS devices, functioning as sensors, actuators, and support structures, find applications in inertial sensors, pressure sensors, chemical sensors, and robotics, among others. Driven by the critical role of catalytic membrane reactors, this dissertation aims to evaluate enzyme activity on polymeric membranes and explore how fabrication methods from the field of Electrical and Computer Engineering (ECE) can incorporate sensing and actuation into these porous surfaces. Toward …
Modeling, Simulation And Control Of Microrobots For The Microfactory., Zhong Yang
Modeling, Simulation And Control Of Microrobots For The Microfactory., Zhong Yang
Electronic Theses and Dissertations
Future assembly technologies will involve higher levels of automation in order to satisfy increased microscale or nanoscale precision requirements. Traditionally, assembly using a top-down robotic approach has been well-studied and applied to the microelectronics and MEMS industries, but less so in nanotechnology. With the boom of nanotechnology since the 1990s, newly designed products with new materials, coatings, and nanoparticles are gradually entering everyone’s lives, while the industry has grown into a billion-dollar volume worldwide. Traditionally, nanotechnology products are assembled using bottom-up methods, such as self-assembly, rather than top-down robotic assembly. This is due to considerations of volume handling of large …
Piezoelectric Bistable Buckled Beam Energy Harvester., Brian Edward Allgeier
Piezoelectric Bistable Buckled Beam Energy Harvester., Brian Edward Allgeier
Electronic Theses and Dissertations
A novel energy harvesting device design is presented to be created via microfabrication techniques. Such devices have countless applications for powering low-current electrical devices, especially wireless sensors or transmitters. This micro-electromechanical system (MEMS) design utilizes the piezoelectric response of a bistable buckled beam to gather electrical energy via ambient vibrations. While many traditional piezoelectric energy harvesters (PEH) consist of simple cantilever beam geometries, this nonlinear design utilizes inertial effects of torsional lever arms to actuate a central buckled beam to snap between its two stable states; such an abrupt strain on the piezoelectric beam potentially produces a significantly increased electrical …
High Frequency Thermally Actuated Single Crystalline Silicon Micromechanical Resonators With Piezoresistive Readout, Amir Rahafrooz
High Frequency Thermally Actuated Single Crystalline Silicon Micromechanical Resonators With Piezoresistive Readout, Amir Rahafrooz
Electronic Theses and Dissertations
Over the past decades there has been a great deal of research on developing high frequency micromechanical resonators. As the two most common and conventional MEMS resonators, piezoelectric and electrostatic resonators have been at the center of attention despite having some drawbacks. Piezoelectric resonators provide low impedances that make them compatible with other low impedance electronic components, however they have low quality factors and complicated fabrication processes. In case of electrostatic resonators, they have higher quality factors but the need for smaller transductions gaps complicates their fabrication process and causes squeezed film damping in Air. In addition, the operation of …
Label-Free Biochemical Recognition Using Mems Resonators For Microarray Technology, Babak Tousifar
Label-Free Biochemical Recognition Using Mems Resonators For Microarray Technology, Babak Tousifar
Electronic Theses and Dissertations
Highly sensitive biosensors capable of detecting and characterizing smallest quantities of cellular and molecular targets are needed in pharmaceutical and medical diagnostics industries. In this work, the importance of biological target recognition specifically proteins through microarray technologies has been discussed and the most successful tools and techniques have been studied. Moreover, a thermally actuated Micro Electro-Mechanical Systems (MEMS) resonator has been demonstrated and fabricated in this work as an accurate, reliable and low cost biotechnology tool. As a proof of concept, amine to epoxide coupling of octadecylamine to functionalized silicon dioxide surface have been shown through resonator frequency monitoring. The …
Novel Conceptual Design And Anlysis Of Polymer Derived Ceramic Mems Sensors For Gas Turbine Environment, Narasimha Nagaiah
Novel Conceptual Design And Anlysis Of Polymer Derived Ceramic Mems Sensors For Gas Turbine Environment, Narasimha Nagaiah
Electronic Theses and Dissertations
Technical challenges for developing micro sensors for Ultra High Temperature and turbine applications lie in that the sensors have to survive extremely harsh working conditions that exist when converting fuel to energy. These conditions include high temperatures (500-1500°C), elevated pressures (200-400 psi), pressure oscillations, corrosive environments (oxidizing conditions, gaseous alkali, and water vapors), surface coating or fouling, and high particulate loading. Several technologies are currently underdeveloped for measuring these parameters in turbine engines. One of them is an optical-based non-contact technology. However, these nondirective measuring technologies lack the necessary accuracy, at least at present state. An alternative way to measure …
Design And Development Of A Mems-Based Capacitive Bending Strain Sensor And A Biocompatible Housing For A Telemetric Strain Monitoring System., Julia Marie Weyer Aebersold 1969-
Design And Development Of A Mems-Based Capacitive Bending Strain Sensor And A Biocompatible Housing For A Telemetric Strain Monitoring System., Julia Marie Weyer Aebersold 1969-
Electronic Theses and Dissertations
Lumbar arthrodesis or spinal fusion is usually performed to relieve back pain and regain functionality from ruptured discs, disc degenerative disease, trauma and scoliosis. Metal rods are often fixed to the spine with screws or hooks, while fusion develops on the affected vertebrae. Fusion is determined by visual examination of radiographic images (X-ray), computed tomography (CT) scans or magnetic resonance imaging (MRI), yet these inspection procedures are subjective methods of review. They do not objectively confirm the presence of spinal fusion, which can lead to exploratory surgery to determine if fusion has occurred. Therefore, a need has arisen to develop …
Non-Silicon Microfabricated Nanostructured Chemical Sensors For Electric Nose Application, Jianwei Gong
Non-Silicon Microfabricated Nanostructured Chemical Sensors For Electric Nose Application, Jianwei Gong
Electronic Theses and Dissertations
A systematic investigation has been performed for "Electric Nose", a system that can identify gas samples and detect their concentrations by combining sensor array and data processing technologies. Non-silicon based microfabricatition has been developed for micro-electro-mechanical-system (MEMS) based gas sensors. Novel sensors have been designed, fabricated and tested. Nanocrystalline semiconductor metal oxide (SMO) materials include SnO2, WO3 and In2O3 have been studied for gas sensing applications. Different doping material such as copper, silver, platinum and indium are studied in order to achieve better selectivity for different targeting toxic gases including hydrogen, carbon monoxide, hydrogen sulfide etc. Fundamental issues like sensitivity, …
Uv-Liga Compatible Electroformed Nano-Structured Materials For Micro Mechanical Systems, Bo Li
Uv-Liga Compatible Electroformed Nano-Structured Materials For Micro Mechanical Systems, Bo Li
Electronic Theses and Dissertations
UV-LIGA is a microfabrication process realzed by material deposition through microfabricated molds. UV photolithography is conducted to pattern precise thick micro molds using UV light sensitive materials, mostly SU-8, and electroforming is performed to fabricate micro metallic structures defined by the micro molds. Therefore, UV-LIGA is a bottom-up in situ material-addition process. UV-LIGA has received broad attention recently than LIGA a micro molding fabrication process using X-ray to pattern the micro molds. LIGA is an expansive and is limited in access. In comparing to LIGA, the UV-LIGA is a cost effective process, and is widely accessible and safe. Therefore, …