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Analytical Modeling Of A Novel Microdisk Resonator For Liquid-Phase Sensing: An All-Shear Interaction Device (Asid), Mohamad Sadegh Sotoudegan

Dissertations (1934 -)

Extensive research on micro/nanomechanical resonators has been performed recently due to their potential to serve as ultra-sensitive devices in chemical/biosensing. These applications often necessitate liquid-phase sensing, introducing significant fluid-induced inertia and energy dissipation that reduces the resonator’s performance. To minimize the detrimental fluid effects on such devices, a novel microdisk resonator supported by two tangentially-oriented, axially-driven “legs” is investigated analytically and effects of the system parameters on the resonator/sensor performance are explored. Since the device surface vibrates primarily parallel to the fluid-structure interface, it is referred to here as an “all-shear interaction device,” or ASID. Analytical modeling of the ASID …