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Modeling And Simulation Of Surface Profile Forming Process Of Microlenses And Their Application In Optical Interconnection Devices, Zhengyu Miao

LSU Doctoral Dissertations

Free space micro-optical systems require to integrate microlens array, micromirrors, optical waveguides, beam splitter, etc. on a single substrate. Out-of-plane microlens array fabricated by direct lithography provides pre-alignment during mask fabrication stage and has the advantage of mass manufacturing at low cost. However, this technology requires precise control of the surface profile of microlenses, which is a major technical challenge. The quality control of the surface profile of microlenses limits their applications. In this dissertation, the surface forming process of the out-of-plane microlenses in UV-lithography fabrication was modeled and simulated using a simplified cellular automata model. The microlens array was …

Pdms Based Waveguides For Microfluidics And Eocb, Weiping Qiu

LSU Master's Theses

Due to the low cost, fast and ease of molding, PDMS has become one of the most popular materials for microfluidics devices, bioMEMS applications. Meanwhile, the integration of different functional components on to one single chip (or Lab on a Chip) is the dream for many scientists and engineers in the related area. In addition to the necessary mechanical components for accommodating the reactions, such as pumps, valves, mixers and so on, optical components such as waveguides, lens, interferers are all desired to be lumped into such a system.

The waveguide for such a system requires the material to have …

Small Footprint High Flow Rate Microdevice For Rare Target Cell Capture, Taehyun Park

LSU Doctoral Dissertations

A novel high flow rate cell capture design was introduced to overcome the limitations of the current technologies or methods for rare target cell capture. Even though the rare target cell capture using BioMEMS technology has great potential for cancer diagnosis, previous rare cell capture research could not overcome the limitations of low flow rate or low recovery rate. Rare cell research requires precise sample preparation for accurate results. A new method of preparation for a single or a precise number of target cell was introduced. Current sample preparation methods which are not suitable for rare cell research, such as …

A Generalized Approach For The Control Of Micro-Electromechanical Relays, Mohamed Abdelrahman Younis

LSU Master's Theses

MEMS (Micro-Electromechanical Systems) is an area of research and applications that is becoming increasingly popular. It's mainly concerned with integrating micro-mechanical transducers with micro-electronic circuits on common substrates, traditionally silicon, through micro-fabrication. Instead of traditionally having the transducer and the communicating (or control) circuit as two separate entities, MEMS miniaturizes and combines them on a single chip, giving it several advantages, saving space, money, and increasing the sensitivity and accuracy of the integrated system. A micro-electromechanical relay is a type of MEM devices that is becoming increasingly important in a wide range of industries such as the computer industry, the …

Simulations And Experimental Analysis Of High-Aspect-Ratio Diffusive Micro-Mixers, Amit Maha

LSU Master's Theses

Passive (diffusional) mixing has been used in designing high-aspect-ratio micro-mixers for the purpose of performing the Liagase Detection Reaction (LDR). A simple model was used to design such mixers optimized for pressure drop or time required to deliver a prescribed volume of mixture. The types of mixers considered are simple, cheap, and durable and can perform over a broad range of volumetric flow rates at reasonably modest pressure drops. The fluids typically have a very low diffusion coefficient of=1.2x10^10m^2/s, and thus diffusional mixing can only be effective in high-aspect-ratio micro-channels. A realizable aspect ratio of 6 has been considered initially …

Manufacturing And Analysis Of A Liga Heat Exchanger For The Surface Of A Tube: A Cooling Simulation Of The Leading Edge Region Of A Turbine Blade, Christophe Marques

LSU Doctoral Dissertations

Fabricating nickel micro heat exchangers directly on planar or non-planar metal surfaces has been demonstrated using the LIGA micromachining process. These heat exchangers can effectively control the temperature of surfaces in high heat flux applications. Of particular interest is the temperature control of gas turbine engine components. The locations in the gas turbine engine where improved, efficient cooling is required includes gas turbine blades, stator vanes, the turbine disk, and the combustor liner. In this dissertation, the primary application of interest is the use of such heat exchangers to cool airfoils such as turbine blades. In the first part of …

The Rapid Template Fabrication Process For Producing A Liga Heat Exchanger Bonded To A Mechanical Seal, Jason Patrick Tuma

LSU Master's Theses

Mechanical seals are widely used in the chemical processing, aerospace, and automotive, industries. When a mechanical seal fails, considerable cost is typically involved in replacing the seal. Most seal failures are a result of high temperatures generated by frictional heating. Effectively removing the heat generated would significantly increase the mechanical seal’s work life and lead to significant monetary savings. One method of removing the heat generated is bonding an effective LIGA micro heat exchanger to the mechanical seal and forcing coolant through the heat exchanger. Previous work on this subject revealed promising results, especially for micro heat exchangers with microstructures …

Development Of A Micro Power Relay With Static Electrical Actuator, Ren Yang

LSU Master's Theses

In this thesis, a research about design and fabrication of a micro power relay is presented. Compared with the traditional electromagnetic relay and solid-state relay, MEMS micro power relay is introduced. After introducing the advantage and other people's research about the MEMS relay, some design and simulation about a new prototype micro power relay are done. Based on the design, UV-LIGA is used as the fabrication method. The bottom part and top part of the micro power relay are fabricated separately. After assembly the top part on the bottom part, some simple tests about the micro power relay are done. …