Digital Commons Network^™

Planar Element Alignment System, Benjamin E. Lavigna, Benny F. Cruz, Samuel Gierhan, Jacob Q. Henriksen

Mechanical Engineering

Precise alignment to the micron level is a necessity for microfluidic/micromechanical devices to function as designed. Because of this, a micro-alignment device was commissioned by Professor Hans Mayer on behalf of the Cal Poly Microfluidics Laboratory. Prototype creation was bounded by a set of requirements including, ability to align PDMS & Silicon wafer halves to ± 10 microns, total process speed of three minutes, and total budget of $3000. Some major design hurdles included an ability to verify alignment, possible non-planar alignment pieces, and an inability to contact any point on the face of the alignment pieces after bonding treatment. …

Fabrication And Characterization Of Torsional Micro-Hinge Structures, Mike Madrid Marrujo

Master's Theses

ABSTRACT

Fabrication and Characterization of Torsional Micro-Hinge Structures

Mike Marrujo

There are many electronic devices that operate on the micrometer-scale such as Digital Micro-Mirror Devices (DMD). Micro actuators are a common type of DMD that employ a diaphragm supported by torsional hinges, which deform during actuation and are critical for the devices to have high stability and reliability. The stress developed within the hinge during actuation controls how the actuator will respond to the actuating force. Electrostatically driven micro actuators observe to have a fully recoverable non-linear viscoelastic response. The device consists of a micro-hinge which is suspended by two …