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Merging Parallel-Plate And Levitation Actuators To Enable Linearity And Tunability In Electrostatic Mems, Mark Pallay, Ronald N. Miles, Shahrzad Towfighian
Merging Parallel-Plate And Levitation Actuators To Enable Linearity And Tunability In Electrostatic Mems, Mark Pallay, Ronald N. Miles, Shahrzad Towfighian
Mechanical Engineering Faculty Scholarship
In this study, a linear electrostatic MEMS actuator is introduced. The system consists of a MEMS cantilever beam with combined parallel-plate and electrostatic levitation forces. By using these two forcing methods simultaneously, the static response and natural frequency can be made to vary linearly with the voltage. The static response shows a linear increase of 90 nm/V and is maintained for more than 12μm of the tip displacement. The natural frequency shows a linear increase of 16 Hz/V and is maintained throughout a 2.9 kHz shift in the natural frequency. This wide range of linear displacement and frequency tunability is …