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Implementation Of A Mems Laboratory Course With Modular, Multidisciplinary Team Projects, John Lee, Stacy H. Gleixner, Tai-Ran Hsu, David W. Parent

David W. Parent

This paper presents the implementation and outcomes of a hands-on laboratory course in microelectromechanical systems (MEMS), co-developed by a multidisciplinary team of faculty from mechanical engineering, electrical engineering, and materials engineering. Central to the design of the course is an emphasis on implementing modules that are able to overcome critical barriers related to (1) diverse academic background from different majors and (2) practical limitations in microfabrication facilities. These points are vital for promoting MEMS education, because they expand the student pool and reach audiences that need a cost-effective way to support instructional laboratory experiences in MEMS without the broader infrastructure …