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Processes For Nanomachining Using Carbon Nanotubes, Robert Ryan Vallance, Apparao M. Rao, M. Pinar Mengüç

Mechanical Engineering Faculty Patents

Novel methods and devices for nanomachining a desired pattern on a surface of a conductive workpiece are disclosed. In one aspect, the method comprises using an electron beam emitted from one or more nanotubes to evaporate nanoscale quantities of material from the workpiece surface. The surface of the workpiece to be machined may be excited to a threshold energy to reduce the amount of power required to be emitted by the nanotube. In another aspect, a device is described for nanomachining a desired pattern on a surface of a conductive workpiece, comprising a vessel capable of sustaining a vacuum, a …