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Theory, Fabrication, And Experimentation Of Phononic Crystals In Mems At Micro/Nano Scale: Engineering Of Thermal And Rf Phonons To Applications In Thermoelectrics And Microresonators, Seyedhamidreza Alaie

Mechanical Engineering ETDs

Phononic Crystals (PnCs) are novel materials comprised of a periodic structure of inclusions in a matrix. This periodic arrangement creates phononic bandgaps, and modifies phononic bandstructures of a material. Such a property offers promising applications at the micro and nano scales to engineer acoustic filters, high Q-factor resonators, and thermoelectric properties of materials. Studying PnCs at the micro/nano scale requires specific characterization techniques, which rely on Micro Electro Mechanical Structures (MEMS). This work focuses on the study, and characterization of PnCs using MEMS in view of their prospective applications in thermoelectric materials, microresonators and acoustic filters, and also the prospective …