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Study Of Conduction Behavior In Dielectrics In Chip Level Interconnects: Detection Of Defects In Al/Sio2 Interconnects, Po-Cheng Lu
Material Science and Engineering Dissertations
This dissertation presents four different electrical measurement techniques to detect structural defects in Al/SiO2 interconnects. These techniques, namely 1) polarity dependence measurement, 2) current voltage measurement, 3) two-point measurement and 4) discharge transient current measurement, can provide simple electrical parameters having direct relationship to defects state (type and quantity) in interconnect structure. All these measurement techniques use the MIM (metal-insulator-metal) structure such as the comb-serpentine structure commonly existing in integrated (IC) devices. This study also presents a newly discovered dielectric failure mechanism, that is the failure by a process of partial discharge dielectric breakdown phenomenon. The goal of the charging …
Computational Study On The Cu-Rich Side Of Aluminum-Copper Phase Diagram, Khaled Ahmed Hirmas
Computational Study On The Cu-Rich Side Of Aluminum-Copper Phase Diagram, Khaled Ahmed Hirmas
Material Science and Engineering Dissertations
Cu-rich side of Al-Cu phase diagram has not been studied extensively as the Al-rich side. It is well established that a one-phase (a phase) exists at 300oC between the 82% Cu and pure Cu, and at the eutectic temperature (1032oC) between 86% Cu and pure Cu, a phase, when quenched from above 600oC and subjected to annealing below about 300oC, or deformation, show ordering effects in resistivity, heat capacity, diffuse X-ray, microstructure, and in mechanical properties. This has been studied to determine whether these effects are due to short-range or long-range ordered domain [1]. The present computational study is to …
Achieving Novel Functionalities In Semiconductor-Crystalline Oxide Heterostructures Through Electrical And Structural Coupling, Kamyar Ahmadi-Majlan
Achieving Novel Functionalities In Semiconductor-Crystalline Oxide Heterostructures Through Electrical And Structural Coupling, Kamyar Ahmadi-Majlan
Material Science and Engineering Dissertations
Creating new materials that exhibit enhanced or novel behaviors is essential to meet the technological challenges we face today. Complex oxides are perfect candidates to overcome these challenges due to the range of electronic, optical, and ionic properties they exhibit. The research presented here, mainly focuses on overcoming two important challenges in oxide electronics. First,the ability of epitaxially growing multifunctional oxides on conventional semiconductor substrates and second, the successful integration of multifunctional oxide properties on semiconductors Oxide molecular beam epitaxy was utilized to grow transition metal oxides with unprecedented control, layer-by-layer, at the atomic scale. Such control of growth enables …
Spectral-Domain Phase-Sensitive Interferometry For Real-Time Probing Of Electrodeposition Processes, Yujen Chiu
Spectral-Domain Phase-Sensitive Interferometry For Real-Time Probing Of Electrodeposition Processes, Yujen Chiu
Material Science and Engineering Dissertations
Electrodeposition is a simple, versatile and scalable method for depositing thin metal films on conductive substrates, and it has long been used in large-scale industrial processes for metal film coating. In the last two decades, electrodeposition has entered into the manufacturing processes of electronic devices. Electrodeposition of Cu has become the standard process for the backend processes for almost all microelectronic devices. Electrodeposition of Cu and magnetic materials are used in the fabrication of write/read head in computer hard disk drive. More recently, a unique electrodeposition process, under potential deposition (UPD), has been utilized for atomic layer deposition to generate …
An Investigation Of The Plasma Electrolytic Oxidation Mechanism For Coating Of Alumina-Zirconia Nanocomposite, Nastaran Barati
An Investigation Of The Plasma Electrolytic Oxidation Mechanism For Coating Of Alumina-Zirconia Nanocomposite, Nastaran Barati
Material Science and Engineering Dissertations
Plasma Electrolytic Oxidation (PEO) is an electrochemical surface modification technique which is able to coat ceramic coatings on valve metals from either cationic or anionic species in an aqueous electrolyte. Applying high voltage in the range of 300-600 V is required to achieve crystalline phases. PEO is a clean technology which offers several benefits including high deposition rates, excellent adhesion strength and mechanical properties. One of the interesting capabilities of the PEO process is its ability to form composite coatings. The following work aims to study the growth mechanism of nanocomposite layers coated by PEO. Two experimental routs have been …
Nature Inspired Technology: A New Process For Silicification Based On Marine Sponges, Ami Atul Shah
Nature Inspired Technology: A New Process For Silicification Based On Marine Sponges, Ami Atul Shah
Material Science and Engineering Dissertations
Silica is used in various industries, ranging from automobile industry for tires to semiconductor industry, paints and coatings, biomedical devices & applications to food & drug industry. The current processing techniques for precipitated silica involve harsh conditions like high temperature and extreme pH conditions. Nature already has highly evolved production techniques for silica. They run at physiological conditions and exhibit intricate control over the synthesis, leading to very pure and ornate siliceous structures. These structures exhibit organized architecture at scales as small as nano-dimensions. The proposed research work is a step, towards development of new techniques that bio-mimic the silica …
Investigation Of The Processing-Structure-Property Relationship In Ta-Si-N Nanocomposite Coatings, Anna Zaman
Investigation Of The Processing-Structure-Property Relationship In Ta-Si-N Nanocomposite Coatings, Anna Zaman
Material Science and Engineering Dissertations
The present-day industry demands development of coatings for harsh environmental applications which can resist impact and oxidation at high temperatures. It is vitally important to develop new hard (>30 GPa) protective coatings which will be thermally stable at temperatures, T > 800 °C and simultaneously will ensure a good protection of the substrate against oxidation from an external atmosphere. The limitations of conventional coatings due to inferior hardness or poor oxidation stability can be overcome by nanocomposite coatings as they exhibit enhanced and completely new properties. To address this requirement of new enhanced protective systems, there is a need to …
Study Of Copper-Rich Intermetallic Phase Formation In Copper-Aluminum Binary System, Valery Georges Ouvarov-Bancalero
Study Of Copper-Rich Intermetallic Phase Formation In Copper-Aluminum Binary System, Valery Georges Ouvarov-Bancalero
Material Science and Engineering Dissertations
This work aims to study the initial formation and subsequent growth of intermetallic compounds (IMC) in the binary Al-Cu system. Al-Cu pair configurations have been successfully used for several decades as structural components, and extensive research on their mechanical and metallurgical properties is available. More recently, the microelectronics industry started implementing the Cu wire-bond technology, which renewed the interest of the scientific community. As with every technological evolution, initial quality and reliability issues arose. Copper (Cu) wire to aluminum (Al) bond-pad is prone to crack nucleation leading to failure at the interface between Cu and Cu-rich IMCs. Even though numerous …