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Electrostatic Micro Actuators For Mirror And Other Applications, Xingtao Wu

Dissertations

Micro-electro-mechanical systems (MEMS) based electrostatic micro actuators are becoming important building blocks for innovations in optical signal processing and computing systems due to their inherently small size, high density, high speed and low power consumption. Generally, the principle of operation in these systems can be described as: an electrostatic attractive force causes a mechanical rotation, translation or deformation of a mirror plate, controlling the power, phase or direction of a light beam while it propagates through some medium or through free space. The fast paced, competitive research and development efforts widely being undertaken, both in academia and industry, are demanding …