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Nano And Microscale Adhesion Energy Measurement For Au-Au Contacts In Microswitch Structures, Nima Rahbar, Zong Zong, Yifang Cao, Wole Soboyejo
Nano And Microscale Adhesion Energy Measurement For Au-Au Contacts In Microswitch Structures, Nima Rahbar, Zong Zong, Yifang Cao, Wole Soboyejo
Nima Rahbar
This paper presents a study of adhesion energies that are relevant to Au–Au microswitch contacts at the nano- and micronscales. Adhesionmeasurements are obtained from cantilevered Aumicroelectromechanical system(MEMS)microswitch structures with varying lengths. Scanning electron microscopymeasurements of the microbeam profiles are combined with fracture mechanics model for the estimation of the adhesion energy. Adhesion contact and pull-off experiments are combined with theoretical models for the extraction of adhesion energies associated with Au-coated atomic force microscopy tips and Aumicroswitch substrates. Finite element method simulation was also performed to account for crack-tip shielding contributions from asperities in contact between Au–Au microscale cantilevered MEMS structure. …
Precision And Accuracy Of Thermal Calibration Of Atomic Force Microscopy Cantilevers, Nancy Burnham, G Matei, E Thoreson, J Pratt, D Newell
Precision And Accuracy Of Thermal Calibration Of Atomic Force Microscopy Cantilevers, Nancy Burnham, G Matei, E Thoreson, J Pratt, D Newell
Nancy A. Burnham
To have confidence in force measurements made with atomic force microscopes(AFMs), the spring constant of the AFM cantilevers should be known with good precision and accuracy, a topic not yet thoroughly treated in the literature. In this study, we compared the stiffnesses of uncoated tipless uniform rectangular silicon cantilevers among thermal, loading, and geometric calibration methods; loading was done against an artifact from the National Institute of Standards and Technology (NIST). The artifact was calibrated at NIST using forces that were traceable to the International System of units. The precision and accuracy of the thermal method were found to be …