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Dynamic Response Of A Tunable Mems Accelerometer Based On Repulsive Force, Meysam Daeichin, Mehmet Ozdogan, Shahrzad Towfighian, Ronald Miles

Mechanical Engineering Faculty Scholarship

This paper describes a tunable MEMS electrostatic accelerometer that uses repulsive electrode configuration so that the design is not hampered by capacitive pull-in instability. The repulsive force configuration enables the increase of DC bias voltage without suffering from the pull-in failure mode. This flexibility in increasing voltage can be employed as a tuning parameter to widen the working frequency range and to improve the robustness of the accelerometer. A lumped parameter model is developed to simulate the response of the microstructure under a combination of electrostatic and dynamic mechanical loading. The electrostatic force is estimated using a finite element simulation. …