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Investigation Into Contact Resistance And Damage Of Metal Contacts Used In Rf-Mems Switches, Kevin W. Gilbert
Investigation Into Contact Resistance And Damage Of Metal Contacts Used In Rf-Mems Switches, Kevin W. Gilbert
Theses and Dissertations
This research examines the physical and electrical processes involved in lifecycle failure of Microelectromechanical (MEMS) Radio-Frequency (RF) cantilever beam ohmic contact switches. Failures of these switches generally occur at the contact, but complete details of performance of microcontacts are difficult to measure and have not been previously reported. This study investigated the mechanics of microcontact behavior by designing and constructing a novel experimental setup. Three representative contact materials of varying microstructure (Au, Au5%Ru, Au4%V2O5) were tested and parameters of contact during cycling were measured. The Au4%V2O5, a dispersion strengthened material developed at …
Off-Axis Stiffness And Piezroresistive Sensing In Large-Displacement Linear-Motion Microelectromechanical Systems, David G. Smith
Off-Axis Stiffness And Piezroresistive Sensing In Large-Displacement Linear-Motion Microelectromechanical Systems, David G. Smith
Theses and Dissertations
Proper positioning of Microelectromechanical Systems (MEMS) components influences the functionality of the device, especially in devices where the motion is in the range of hundreds of micrometers. There are two main obstacles to positioning: off-axis displacement, and position determination. This work studies four large-displacement devices, their axial and transverse stiffness, and piezoresistive response. Methods for improving the device characteristics are described. The folded-beam suspension, small X-Bob, large X-Bob and double X-Bob were characterized using non-dimensional metrics that measure the displacement with regard to the size of the device, and transverse stiffness with regard to axial stiffness. The stiffness in each …