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Modeling And Control Of Surface Micromachined Thermal Actuators, Robert K. Messenger

Theses and Dissertations

A model that accurately describes the transient and steady-state response of thermal microactuators is desirable to provide guidance for design and operation. However, modeling the full response of thermal actuators is challenging due to the temperature-dependent material properties and nonlinear deformations that must be included to obtain accurate results. To meet these challenges a three-dimensional multi-physics nonlinear finite-element model was developed using commercial code. The Thermomechanical Inplane Microactuator (TIM) was chosen as a candidate application to validate the model. TIMs were fabricated using the SUMMiT V™ process and their response was measured using a high-speed camera. The TIMs were modeled …