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On-Chip Actuation Of Compliant Bistable Micro-Mechanisms, Michael S. Baker
On-Chip Actuation Of Compliant Bistable Micro-Mechanisms, Michael S. Baker
Theses and Dissertations
Two compliant bistable micro-mechanisms have been developed which can be switched in either direction using on-chip thermal actuation. The energy storage and bistable behavior of the mechanisms are achieved through the elastic deflection of compliant segments. The pseudo-rigid-body model was used for the compliant mechanism design, and for analysis of the large-deflection flexible segments. To achieve on-chip actuation, the mechanism designs were optimized to reduce their required rotation, allow them to be switched using linear-motion thermal actuators. The modeling theory and analysis are presented for several design iterations. Each iteration was successfully fabricated and tested using either the MUMPs or …
Thermal Microactuators For Microelectromechanical Systems (Mems), Rebecca Cragun
Thermal Microactuators For Microelectromechanical Systems (Mems), Rebecca Cragun
Theses and Dissertations
Microactuators are needed to convert energy into mechanical work at the microscale. Thermal microactuators can be used to produce this needed mechanical work. The purpose of this research was to design, fabricate, and test thermal microactuators for use at the microscale in microelectromechanical systems (MEMS). The microactuators developed were tested to determine the magnitude of their deflection and estimate their force. Five groups of thermal microactuators were designed and tested. All of the groups used the geometrically constrained expansion of various segments to produce their deflection. The first group, Thermal Expansion Devices (TEDs), produced a rotational displacement and had deflections …
An Investigation Of Compliant Over-Running Ratchet And Pawl Clutches, Gregory Mark Roach
An Investigation Of Compliant Over-Running Ratchet And Pawl Clutches, Gregory Mark Roach
Theses and Dissertations
This thesis proposes that compliant mechanism theory can be used to design over-running ratchet and pawl clutches with reduced part count, lower assembly and manufacturing time while maintaining functionality. An extension of the theory to the micro regime is also briefly addressed. The results of the research show that the ratchet and pawl type of over-running clutch is a good choice for the use of compliance, and the clutch pawls should be loaded in compression to get the largest amount of output torque. It was found that com-pliant mechanism theory can be used to design ratchet and pawl clutches with …