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Electrostatic Levitation: An Elegant Method To Control Mems Switching Operation, Mohammad Mousavi, Mohammad Alzgool, Shahrzad Towfighian
Electrostatic Levitation: An Elegant Method To Control Mems Switching Operation, Mohammad Mousavi, Mohammad Alzgool, Shahrzad Towfighian
Mechanical Engineering Faculty Scholarship
This paper investigates the characteristics of a micro-switch that uses two side electrodes to open a normally closed switch. The side electrodes surround the xed electrode in the well-known gap-closing electrode configuration. The side electrodes can open a closed switch and be tuned to respond appropriately to outside forces. The combined electrode system dramatically improves the control of a standard gap-closing electrode configuration. In conventional switches, a DC voltage above a certain value closes the switch. To re-open the switch, the voltage difference is reduced to peel o the moving electrode. Currently the contact area is carefully designed to avoid …
A Reliable Mems Switch Using Electrostatic Levitation, Mark Pallay, Shahrzad Towfighian
A Reliable Mems Switch Using Electrostatic Levitation, Mark Pallay, Shahrzad Towfighian
Mechanical Engineering Faculty Scholarship
In this study an electrostatic MEMS beam is experimentally released from pull-in using electrostatic levitation. A MEMS cantilever with a parallel plate electrode configuration is pulled-in by applying a voltage above the pull-in threshold. Two more electrodes are fixed to the substrate on both sides of the beam to create electrostatic levitation. Large voltage pulses upwards of 100 V are applied to the side electrodes to release the pulled-in beam. A high voltage is needed to overcome the stronger parallel plate electrostatic force and stiction forces, which hold the beam in its pulled-in position. A relationship between bias voltage and …