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Large-Stroke Capacitive Mems Accelerometer Without Pull-In, Meysam Daeichin, Ronald Miles, Shahrzad Towfighian
Large-Stroke Capacitive Mems Accelerometer Without Pull-In, Meysam Daeichin, Ronald Miles, Shahrzad Towfighian
Mechanical Engineering Faculty Scholarship
In this study, the feasibility of obtaining electrical read-out data from a capacitive MEMS accelerometer that employs repulsive electrode configuration is demonstrated. This configuration allows for large-stroke vibrations of microstructures without suffering from pull-in failure that exists in conventional accelerometers based on the parallelplate configuration. With initial fabrication gap of 2:75um, the accelerometer can reach a 4:2um dynamical displacement amplitude. The accelerometer is tested up to 95(V) without exhibiting pull-in failure. For comparison, the pull-in voltage of an accelerometer with same dimensions but with conventional parallel-plate electrode configuration is 0:8(V). The MEMS device is fabricated using the POLYMUMPs fabrication standard. …
Dynamic Response Of A Tunable Mems Accelerometer Based On Repulsive Force, Meysam Daeichin, Mehmet Ozdogan, Shahrzad Towfighian, Ronald Miles
Dynamic Response Of A Tunable Mems Accelerometer Based On Repulsive Force, Meysam Daeichin, Mehmet Ozdogan, Shahrzad Towfighian, Ronald Miles
Mechanical Engineering Faculty Scholarship
This paper describes a tunable MEMS electrostatic accelerometer that uses repulsive electrode configuration so that the design is not hampered by capacitive pull-in instability. The repulsive force configuration enables the increase of DC bias voltage without suffering from the pull-in failure mode. This flexibility in increasing voltage can be employed as a tuning parameter to widen the working frequency range and to improve the robustness of the accelerometer. A lumped parameter model is developed to simulate the response of the microstructure under a combination of electrostatic and dynamic mechanical loading. The electrostatic force is estimated using a finite element simulation. …