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Dynamics Of A Close-Loop Controlled Mems Resonator, Abdulrahman Seleim, Shahrzad Towfighian, Emmanuel Delande, Eihab Abdel-Rahman, Glenn Heppler
Dynamics Of A Close-Loop Controlled Mems Resonator, Abdulrahman Seleim, Shahrzad Towfighian, Emmanuel Delande, Eihab Abdel-Rahman, Glenn Heppler
Mechanical Engineering Faculty Scholarship
The dynamics of a close-loop electrostatic MEMS resonator, proposed as a platform for ultra sensitive mass sensors, is investigated. The parameter space of the resonator actuation voltage is investigated to determine the optimal operating regions. Bifurcation diagrams of the resonator response are obtained at five different actuation voltage levels. The resonator exhibits bi-stability with two coexisting stable equilibrium points located inside a lower and an upper potential wells. Steady-state chaotic attractors develop inside each of the potential wells and around both wells. The optimal region in the parameter space for mass sensing purposes is determined. In that region, steady-state chaotic …