Digital Commons Network^™

Feasibility Study Of A Micro-Electro-Mechanical-Systems Threshold-Pressure Sensor Based On Parametric Resonance: Experimental And Theoretical Investigations, Mark Pallay, Meysam Daeichin, Shahrzad Towfighian

Mechanical Engineering Faculty Scholarship

A tunable threshold pressure sensor based on parametric resonance of a microbeam subjected to electrostatic levitation is proposed. Parametric excitation can trigger a large amplitude vibration at twice the natural frequency if the magnitude of the driving force is large enough to overcome energy loss mechanisms in the system such as squeeze film damping. This causes a temporarily unstable response with a significant gain in oscillation amplitude over time until it is eventually capped by nonlinearities in the force or material or geometric properties. The instability divides the frequency region into two regions: distinct responses bounded by the system non-linearity, …

Characterization Of A Packaged Triboelectric Harvester Under Simulated Gait Loading For Total Knee Replacement, Nabid Aunjum Hossain, Geofrey George Yamomo, Ryan Willing, Shahrzad Towfighian

Mechanical Engineering Faculty Scholarship

Load sensing total knee replacement (TKR) implants are useful tools for monitoring prosthesis health and providing quantitative data to support patient claims of pain or instability. Powering such devices throughout the entire life of the knee replacement, however, is a challenge, and selfpowered telemetry via energy harvesting is an attractive solution. Herein, we implemented vertical contact mode triboelectric energy harvesters inside a knee implant package to generate the power required for embedded digitization and communications circuitry. The harvesters produce small-scale electric power from physiologically relevant loads transmitted through the knee. Experiments were performed on a joint motion simulator with an …

Feasibility Study Of A Mems Threshold-Pressure Sensor Based On Parametric Resonance: Experimental And Theoretical Investigations, Mark Pallay, Meysam Daeichin, Shahrzad Towfighian

Mechanical Engineering Faculty Scholarship

A tunable threshold pressure sensor based on para- metric resonance of a microbeam subjected to electrostatic levitation is proposed. Parametric excitation can trigger a large amplitude vibration at twice the natural frequency if the mag- nitude of the driving force is large enough to overcome energy loss mechanisms in the system such as squeeze film damping. This causes a temporarily unstable response with a significant gain in oscillation amplitude over time until it is eventually capped by nonlinearities in the force or material or geometric properties. The instability divides the frequency region into two regions: distinct responses bounded by the …

Large-Stroke Capacitive Mems Accelerometer Without Pull-In, Meysam Daeichin, Ronald Miles, Shahrzad Towfighian

Mechanical Engineering Faculty Scholarship

In this study, the feasibility of obtaining electrical read-out data from a capacitive MEMS accelerometer that employs repulsive electrode configuration is demonstrated. This configuration allows for large-stroke vibrations of microstructures without suffering from pull-in failure that exists in conventional accelerometers based on the parallelplate configuration. With initial fabrication gap of 2:75um, the accelerometer can reach a 4:2um dynamical displacement amplitude. The accelerometer is tested up to 95(V) without exhibiting pull-in failure. For comparison, the pull-in voltage of an accelerometer with same dimensions but with conventional parallel-plate electrode configuration is 0:8(V). The MEMS device is fabricated using the POLYMUMPs fabrication standard. …

Parametric Study Of A Triboelectric Transducer In Total Knee Replacement Application, Alwathiqbellah Ibrahim, Geofrey Yamomo, Ryan Willing, Shahrzad Towfighian

Mechanical Engineering Faculty Scholarship

Triboelectric energy harvesting is a relatively new technology showing promise for biomedical applications. This study investigates a triboelectric energy transducer for potential applications in total knee replacement (TKR) both as an energy harvester and a sensor. The sensor can be used to monitor loads at the knee joint. The proposed transducer generates an electrical signal that is directly related to the periodic mechanical load from walking. The proportionality between the generated electrical signal and the load transferred to the knee enables triboelectric transducers to be used as self-powered active load sensors. We analyzed the performance of a triboelectric transducer when …

Towards A High Bias Voltage Mems Filter Using Electrostatic Levitation, Mark Pallay, Ronald Miles, Shahrzad Towfighian

Mechanical Engineering Faculty Scholarship

Traditional MEMS filters use a comb drive structure that suffers from the pull- in instability, which places a significant limitation on the achievable signal-to- noise ration of the sensor. Because the output signal from a capacitive sensor

is linearly related to the applied voltage, it is desirable to use a capacitive sensor that can withstand large voltages upwards of 100V. However, the pull-in instability causes high voltages to destroy the device and a trade-off between performance and reliability must be made. Electrostatic levitation, which works by pulling electrodes apart instead of together, eliminates the pull-in instability and allows for very …

Experimental Characterization Of The Electrostatic Levitation Force In Mems Transducers, Meysam Daeichin, Ronald Miles, Shahrzad Towfighian

Mechanical Engineering Faculty Scholarship

In this study, a two-step experimental procedure is described to determine the electrostatic levitation force in MEMS transducers. In these two steps, the microstructure is excited quasi-statically and dynamically and its response is used to derive the electrostatic force. The experimental results are obtained for a 1 by 1 plate that employs 112 levitation units. The experimentally obtained force is used in a lumped parameter model to find the microstructure response when it is subjected to different dynamical loads. The natural frequency and the damping ratios in the model are identified from the experimental results. The results show this procedure …

Lateral Pull-In Instability Of Electrostatic Mems Transducers Employing Repulsive Force, Meysam Daeichin, Ronald Miles, Shahrzad Towfighian

Mechanical Engineering Faculty Scholarship

We report on the lateral pull-in in capacitive MEMS transducers that employ a repulsive electrostatic force. The moving element in this system undergoes motion in two dimensions. A two degree-offreedom mathematical model is developed to investigate the pull-in quantitatively. The nonlinear electrostatic force, which is a vector function of two spatial coordinates, is determined by calculating the potential energy of the system using a boundary element approach. The equilibrium points are found by numerically solving the nonlinear coupled static equations. A stability analysis reveals that depending on the values of the lateral and transverse stiness, the system undergoes dierent bifurcations …

Modeling And Characterization Of A Pull-In Free Mems Microphone, Mehmet Ozdogan, Shahrzad Towfighian, Ronald Miles

Mechanical Engineering Faculty Scholarship

In this study, we examine the feasibility of designing a MEMS microphone employing a levitation based electrode configuration. This electrode scheme enables capacitive MEMS sensors that could work for large bias voltages without pullin failure. Our experiments and simulations indicate that it is possible to create robust sensors properly working at high DC voltages, which is not feasible for most of the conventional parallel plate electrode-based micro-scale devices. In addition, the use of larger bias voltages will improve signal-to-noise ratios in MEMS sensors because it increases the signal relative to the noise in read-out circuits. This study presents the design, …

Analysis Of Mechanical Deformation Eect On The Voltage Generation Of A Vertical Contact Mode Triboelectric Generator, Nabid Aunjum Hossain, Mir Jalil Razavi, Shahrzad Towfighian

Mechanical Engineering Faculty Scholarship

One of the associated factors that controls the performance of a triboelectric generator (TEG) is the mechanical deformation of the dielectric layer. Therefore, a good contact model can be a prominent tool to find a more realistic and efficient way of determining the relationships between the contact and electrical output of the generator. In this study, experiments are conducted on a vertical contact mode triboelectric generator under an MTS machine. The open-circuit voltages are measured at different loads imposed by the MTS by controlling the cyclic displacement of the top tribo layer of the generator. A finite-element-based theoretical model is …