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- Electrostatic BeamsIn this paper (1)
- Electrostatic levitation (1)
- MEMS (1)
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- Parametric excitation of a repulsive force electrostatic resonator is studied. A theoretical model is developed and validated by experimental data. A correspondence of the model to Mathieu's Equation is made to prove the existence and location of parametric resonance. The repulsive force creates a combined response that shows parametric and subharmonic resonance when driven at twice its natural frequency. The resonator can achieve large amplitudes of almost 24 μm and can remain dynamically stable while tapping on the electrode. Because the pull-in instability is eliminated (1)
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- Parametric resonance (1)
- Pull-in stability (1)
- Release (1)
- Reliability (1)
- Repulsive force (1)
- Repulsive-force (1)
- Stable trajectories that would not be possible with traditional electrostatic actuation. A large dynamic range is attractive for MEMS resonators that require a large signal-to-noise ratio. (1)
- The beam bounces off after impact instead of sticking to the electrode. This creates larger (1)
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A Reliable Mems Switch Using Electrostatic Levitation, Mark Pallay, Shahrzad Towfighian
A Reliable Mems Switch Using Electrostatic Levitation, Mark Pallay, Shahrzad Towfighian
Mechanical Engineering Faculty Scholarship
In this study an electrostatic MEMS beam is experimentally released from pull-in using electrostatic levitation. A MEMS cantilever with a parallel plate electrode configuration is pulled-in by applying a voltage above the pull-in threshold. Two more electrodes are fixed to the substrate on both sides of the beam to create electrostatic levitation. Large voltage pulses upwards of 100 V are applied to the side electrodes to release the pulled-in beam. A high voltage is needed to overcome the stronger parallel plate electrostatic force and stiction forces, which hold the beam in its pulled-in position. A relationship between bias voltage and …
A Parametric Electrostatic Resonator Using Repulsive Force, Mark Pallay, Shahrzad Towfighian
A Parametric Electrostatic Resonator Using Repulsive Force, Mark Pallay, Shahrzad Towfighian
Mechanical Engineering Faculty Scholarship
In this paper, parametric excitation of a repulsive force electrostatic resonator is studied. A theoretical model is developed and validated by experimental data. A correspondence of the model to Mathieu's Equation is made to prove the existence and location of parametric resonance. The repulsive force creates a combined response that shows parametric and subharmonic resonance when driven at twice its natural frequency. The resonator can achieve large amplitudes of almost 24 μm and can remain dynamically stable while tapping on the electrode. Because the pull-in instability is eliminated, the beam bounces off after impact instead of sticking to the electrode. …