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Mechanical Engineering

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Electronic Theses and Dissertations

Theses/Dissertations

2005

MEMS

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Design And Development Of A Mems-Based Capacitive Bending Strain Sensor And A Biocompatible Housing For A Telemetric Strain Monitoring System., Julia Marie Weyer Aebersold 1969- May 2005

Design And Development Of A Mems-Based Capacitive Bending Strain Sensor And A Biocompatible Housing For A Telemetric Strain Monitoring System., Julia Marie Weyer Aebersold 1969-

Electronic Theses and Dissertations

Lumbar arthrodesis or spinal fusion is usually performed to relieve back pain and regain functionality from ruptured discs, disc degenerative disease, trauma and scoliosis. Metal rods are often fixed to the spine with screws or hooks, while fusion develops on the affected vertebrae. Fusion is determined by visual examination of radiographic images (X-ray), computed tomography (CT) scans or magnetic resonance imaging (MRI), yet these inspection procedures are subjective methods of review. They do not objectively confirm the presence of spinal fusion, which can lead to exploratory surgery to determine if fusion has occurred. Therefore, a need has arisen to develop …


Non-Silicon Microfabricated Nanostructured Chemical Sensors For Electric Nose Application, Jianwei Gong Jan 2005

Non-Silicon Microfabricated Nanostructured Chemical Sensors For Electric Nose Application, Jianwei Gong

Electronic Theses and Dissertations

A systematic investigation has been performed for "Electric Nose", a system that can identify gas samples and detect their concentrations by combining sensor array and data processing technologies. Non-silicon based microfabricatition has been developed for micro-electro-mechanical-system (MEMS) based gas sensors. Novel sensors have been designed, fabricated and tested. Nanocrystalline semiconductor metal oxide (SMO) materials include SnO2, WO3 and In2O3 have been studied for gas sensing applications. Different doping material such as copper, silver, platinum and indium are studied in order to achieve better selectivity for different targeting toxic gases including hydrogen, carbon monoxide, hydrogen sulfide etc. Fundamental issues like sensitivity, …


Uv-Liga Compatible Electroformed Nano-Structured Materials For Micro Mechanical Systems, Bo Li Jan 2005

Uv-Liga Compatible Electroformed Nano-Structured Materials For Micro Mechanical Systems, Bo Li

Electronic Theses and Dissertations

UV-LIGA is a microfabrication process realzed by material deposition through microfabricated molds. UV photolithography is conducted to pattern precise thick micro molds using UV light sensitive materials, mostly SU-8, and electroforming is performed to fabricate micro metallic structures defined by the micro molds. Therefore, UV-LIGA is a bottom-up in situ material-addition process. UV-LIGA has received broad attention recently than LIGA – a micro molding fabrication process using X-ray to pattern the micro molds. LIGA is an expansive and is limited in access. In comparing to LIGA, the UV-LIGA is a cost effective process, and is widely accessible and safe. Therefore, …