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Cantilever, MEMS, piezoresistive accelerometer, resonant mass sensor, sensor, vibration energy harvester
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Gapped Cantilever For The Enhancement Of Strain Sensitivity And Energy Efficiency, Qinglong Zheng
Gapped Cantilever For The Enhancement Of Strain Sensitivity And Energy Efficiency, Qinglong Zheng
Wayne State University Dissertations
Cantilever structures have been widely used in a large variety of transducer applications. For cantilever based transducers, piezoresistive/piezoelectric mechanisms has always been a popular choice due to the advantages of being low cost, simple structure and portability. However, low sensitivity is recognized as a major disadvantage of these transducers compared with optical based measurement. In this research, a gapped cantilever structure is proposed to potentially increase the sensitivity by orders of magnitude. In order to guide the design, an advanced analytical model is developed, and the increased strain sensitivity is theoretically demonstrated. In addition, optimizations with this model interestingly reveal …