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Amplitude-Voltage Response Of Parametric Resonance Of Electrostatically Actuated Circular Membranes, Marcos Alipi, Dumitru I. Caruntu

Mechanical Engineering Faculty Publications and Presentations

This paper deals with the amplitude-voltage response of parametric resonance of electrostatically actuated MEMS circular membranes resonator for sensing applications. The system consists of a flexible circular membrane over a parallel ground plate. A soft AC voltage is applied between the MEMS membrane and ground plate to actuate the membrane near its first natural frequency. Two methods of investigation are used in this research, namely the method of multiple scales (MMS), and the reduced order model (ROM). These methods were used to solve for the voltage response of the MEMS analytically and numerically. This work also reports the effects the …