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Material Characterization And Comparison Of Sol-Gel Deposited And Rf Magnetron Deposited Lead Zirconate Titanate Thin Films, Katherine Lynne Miles
Material Characterization And Comparison Of Sol-Gel Deposited And Rf Magnetron Deposited Lead Zirconate Titanate Thin Films, Katherine Lynne Miles
Mechanical Engineering ETDs
Lead zirconate titanate (PZT) has been a material of interest for sensor, actuator, and transducer applications in microelectromechanical systems (MEMS). This is due to their favorable piezoelectric, pyroelectric and ferroelectric properties. While various methods are available to deposit PZT thin films, radio frequency (RF) magnetron sputtering was selected to provide high quality PZT films with the added capability of batch processing. These sputter deposited PZT films were characterized to determine their internal film stress, Young’s modulus, composition, and structure. After characterization, the sputtered PZT samples were poled using corona poling and direct poling methods. As a means of comparison, commercially …
Zero-Power Ac Current Sensor, Omar Aragonez
Zero-Power Ac Current Sensor, Omar Aragonez
Mechanical Engineering ETDs
In this study, a magnetic piezoelectric cantilever powered AC current and frequency sensor is proposed. This paper covers the configuration of the experimental setup, finite element modeling of the magnetic coupling, and the optimal spatial location of the magnetic proof mass in relation to the wire for smart grid applications. Solid and stranded copper wires of various gauges were used and carried current up to 30A. The magnets act as a proof mass to lower the frequency while also coupling to the magnetic field generated by the current carrying wire. The frequency of the AC current produces a sinusoidal force …