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Multi-Physical Study Of Mems Resonators And Oscillators, Xiaobo Guo

Electronic Theses and Dissertations

First, this research presents experimental and theoretical investigation of the response of micro scale dual-plate thermal-piezoresistive resonators (TPR) and self-sustained oscillators (TPO) to different gases and pressures. It is demonstrated that the resonant frequency of such devices follows particular trends in response to the changes in the surrounding gas and its pressure. A mathematical model has been derived to explain the damping dependent frequency shift characteristic of TPO. The solution of the model indicates that the stiffness of the actuator beam decreases as the value of damping coefficient drops at lower gas density caused by the change in the gas …