Digital Commons Network^™

Back-End Processing Of Scanning Mirrors With Scratch Drive Actuators, Pradeep Pai

LSU Master's Theses

The use of micro-electro-mechanical system (MEMS) processes in fabrication of micr- electro-mechanical devices for optical applications has been widespread. The invention of digital light processing (DLP) technology by Texas Instruments Inc. popularized the use of micro-mirrors. One of the applications of the micro-mirrors is in the form of scanners for biomedical imaging. The small size of mirrors and actuators makes them a good candidate for in vivo measurements/imaging. Various techniques in bulk- and surface-micromachining, and various actuators have been used to fabricate scanning mirrors. The scanning mirrors used in this work make use of scratch drive actuators (SDA) for their …