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Ultra-Thin Aluminum Nitride Thin Films For Flexible Mems Sensors, Md Sajeeb Rayhan
Ultra-Thin Aluminum Nitride Thin Films For Flexible Mems Sensors, Md Sajeeb Rayhan
Electrical Engineering Dissertations
Microelectromechanical systems (MEMS) sensors using ultrathin aluminum nitride (AlN) film were developed and fabricated using conventional photolithography techniques in the class 100 clean room with a view to integrate them in flexible substrates along with flexible electronics. The MEMS sensors were designed, analytically modeled, fabricated and characterized. Some of the MEMS sensors were only designed and simulated using finite element method (FEM) for the scope of the dissertation. These MEMS sensors can be applied to many applications such as automobile, robotics, biomedical, biometrics, health condition monitoring, GPS tracking devices, smartphones and aircrafts. MEMS pressure sensors using AlN based piezoelectric film …