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Preserving Optical Confinement In Pecvd Sio2 Waveguides By Control Of Thin-Film Stress, Steven Jay Hammon

Theses and Dissertations

Researchers at Brigham Young University (BYU) have developed an optical biosensor that can quickly analyze a sample to detect any type of nucleic acid based organism, such as viruses or bacteria. The biosensor's reliability over time is compromised due to water absorbing into the SiO₂ waveguides of the chip. It was hypothesized that keeping the thin-film stress of the waveguides close to zero would slow or stop water absorption from occurring. Completion of this thin-film study relied upon a new plasma enhanced chemical vapor deposition (PECVD) machine and a new 3-D optical profilometer, both of which were installed in …