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Purdue University

School of Aeronautics and Astronautics Faculty Publications

2006

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Comparison Of Kinetic Models For Gas Damping Of Moving Microbeams, Alina A. Alexeenko, E Phillip Muntz, Michael A. Gallis, John R. Torczynski Jan 2006

Comparison Of Kinetic Models For Gas Damping Of Moving Microbeams, Alina A. Alexeenko, E Phillip Muntz, Michael A. Gallis, John R. Torczynski

School of Aeronautics and Astronautics Faculty Publications

Numerical investigations of the gas flow structure and the gas-damping force on moving and heated microbeams are carried out using the Navier-Stokes equations with first-order velocity-slip and temperature-jump boundary conditions (the NSSJ method) and two kinetic numerical techniques: the particle-based direct simulation Monte Carlo (DSMC) method, and a deterministic discrete-ordinate solution of the ellipsoidal statistical (ES) kinetic model equation. The gas-damping coefficients on a moving microbeam for quasi-static isothermal conditions are estimated by the three numerical methods for Kn = 0.1-1.0. The NSSJ simulations tend to overestimate the gas-damping coefficient for Knudsen numbers larger than 0.1, whereas the DSMC and …