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Investigation Into Contact Resistance And Damage Of Metal Contacts Used In Rf-Mems Switches, Kevin W. Gilbert

Theses and Dissertations

This research examines the physical and electrical processes involved in lifecycle failure of Microelectromechanical (MEMS) Radio-Frequency (RF) cantilever beam ohmic contact switches. Failures of these switches generally occur at the contact, but complete details of performance of microcontacts are difficult to measure and have not been previously reported. This study investigated the mechanics of microcontact behavior by designing and constructing a novel experimental setup. Three representative contact materials of varying microstructure (Au, Au5%Ru, Au4%V₂O₅) were tested and parameters of contact during cycling were measured. The Au4%V₂O₅, a dispersion strengthened material developed at …