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Fabrication And Characterization Of Back Illuminated Cmos Photodiode Array, Amitra Banerjee

Theses

With the rapid development in low-cost CMOS technology, silicon photodiodes are currently recognized as promising choice for the imager core. In this research, the arrays of back illuminated photodiodes were designed, fabricated and demonstrated with CMOS imager fabrication process on silicon wafers. The main purpose of this work was to improve the contribution of these arrays on the imaging systems before committing their design on the chips.

In this CMOS process, first the n-well, p-well, n+and p+ regions were simulated and fabricated by several implantation processes. The n-well region was implanted by phosphorus at an energy of 170 keV and …