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Effects Of Deposition Temperature And Post Deposition Annealing On The Electrical Properties Of Barium Strontium Titanate Thin Film For Embedded Capacitor Applications, Ranganathan, Ravip Peelamedu

Electronic Theses and Dissertations

A higher degree of system level integration can be achieved by integrating the passive components into semiconductor devices, which seem to be an enabling technology for portable communication and modern electronic devices. Greater functionality, higher performance and increase in reliability can be achieved by miniaturizing and reducing the number of components in integrated circuits. The functional potential of small electronic devices can be enormously increased by implementing the embedded capacitors, resistors and inductors. This would free up surface real estate allowing either a smaller footprint or more silicon devices to be placed on the same sized substrate. This thesis focuses …